发明授权
- 专利标题: Method of forming a container capacitor structure
- 专利标题(中): 形成容器电容器结构的方法
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申请号: US389866申请日: 1999-09-02
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公开(公告)号: US6159818A公开(公告)日: 2000-12-12
- 发明人: D. Mark Durcan , Trung T. Doan , Roger R. Lee , Fernando Gonzalez , Er-Xuan Ping
- 申请人: D. Mark Durcan , Trung T. Doan , Roger R. Lee , Fernando Gonzalez , Er-Xuan Ping
- 申请人地址: ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/8242 ; H01L27/108 ; H01L21/20
摘要:
Disclosed is a container capacitor structure and method of constructing it. An etch mask and etch are used to expose portions of an exterior surface of electrode ("bottom electrodes") of the container capacitor structure. The etch provides a recess between proximal pairs of container capacitor structures, which recess is available for forming additional capacitance. Accordingly, a capacitor dielectric and a top electrode are formed on and adjacent to, respectively, both an interior surface and portions of the exterior surface of the first electrode. Advantageously, surface area common to both the first electrode and second electrodes is increased over using only the interior surface, which provides additional capacitance without a decrease in spacing for clearing portions of the capacitor dielectric and the second electrode away from a contact hole location. Furthermore, such clearing of the capacitor dielectric and the second electrode portions may be done at an upper location of a substrate assembly in contrast to clearing at a bottom location of a contact via.
公开/授权文献
- US5790080A Meander line loaded antenna 公开/授权日:1998-08-04
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