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US6160284A Semiconductor device with sidewall insulating layers in the capacitor contact hole 失效
半导体存储器件,在电容器接触孔中具有侧壁绝缘层

Semiconductor device with sidewall insulating layers in the capacitor
contact hole
摘要:
Source/drain regions of an MOS transistor are formed at a surface of a p-type silicon substrate. A storage node electrically connected to the source/drain regions penetrates a bit line to reach the n-type source/drain region. The storage node and the bit line are insulated from each other by a sidewall insulating layer. Thus, a semiconductor memory device suitable for high integration is obtained in which short-circuit between the storage node and the bit line on a gate electrode layer can be prevented.
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