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US06193859B1 Electric potential shaping apparatus for holding a semiconductor wafer during electroplating 失效
电镀期间保持半导体晶片的电位成形装置

Electric potential shaping apparatus for holding a semiconductor wafer during electroplating
Abstract:
An apparatus for depositing an electrically conductive layer on the surface of a wafer comprises a flange. The flange has a cylindrical wall and an annulus attached to a first end of the cylindrical wall. The annulus shields the edge region of the wafer surface during electroplating reducing the thickness of the deposited electrically conductive layer on the edge region. Further, the cylindrical wall of the flange can be provided with a plurality of apertures adjacent the wafer allowing gas bubbles entrapped on the wafer surface to readily escape.
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