发明授权
US06345435B1 Method to make laminated yoke for high data rate giant magneto-resistive head
失效
用于高数据速率巨磁阻头的叠片磁轭的方法
- 专利标题: Method to make laminated yoke for high data rate giant magneto-resistive head
- 专利标题(中): 用于高数据速率巨磁阻头的叠片磁轭的方法
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申请号: US09443448申请日: 1999-11-22
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公开(公告)号: US06345435B1公开(公告)日: 2002-02-12
- 发明人: Cherng-Chyi Han , Chyu-Jiuh Torng , Rodney Lee , Kochan Ju
- 申请人: Cherng-Chyi Han , Chyu-Jiuh Torng , Rodney Lee , Kochan Ju
- 主分类号: G11B542
- IPC分类号: G11B542
摘要:
A method and design for the fabrication of a laminated yoke for a high data rate magnetic read-write transducer head. A full film layer of first ferromagnetic material is formed on a base using either plating or sputtering. The base comprises a read head, a ferromagnetic pole piece, and a ferromagnetic shield which also serves as a pole piece. A patterned layer of first non-magnetic dielectric is then formed on the full film layer of first ferromagnetic material. A patterned layer of photoresist is then formed on the full film layer of first ferromagnetic material and the patterned non-magnetic dielectric and used as a frame for a frame plating deposition of a patterned layer of second ferromagnetic material. The full film layer of first ferromagnetic material and the non-magnetic dielectric are then patterned, using the patterned layer of second ferromagnetic material as a mask and ion beam etching.
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