发明授权
US06369493B1 Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
失效
微波等离子体施加器具有在等离子体容纳管和冷却套之间的热转印介质
- 专利标题： Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
- 专利标题（中）： 微波等离子体施加器具有在等离子体容纳管和冷却套之间的热转印介质
-
申请号： US09300182申请日： 1999-04-27
-
公开(公告)号： US06369493B1公开(公告)日： 2002-04-09
- 发明人: Dmitry Lubomirsky , Harald Herchen , Simon Yavelberg , David Palagashvili , Donald J. Olgado
- 申请人： Dmitry Lubomirsky , Harald Herchen , Simon Yavelberg , David Palagashvili , Donald J. Olgado
- 主分类号： H01J1726
- IPC分类号： H01J1726
摘要：
A plasma applicator having a tube that is surrounded by a cooling jacket such that a volume is defined proximate the tube. The volume is filled with a thermal transfer medium to couple heat from the tube to the cooling jacket. The cooling jacket contains an aperture through which energy is transmitted to a process gas contained in the tube. As such, the process gas is infused with energy and a plasma is formed in the tube.
信息查询
