发明授权
US06399406B2 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof
失效
用于集成电路的封装的MEMS带通滤波器及其制造方法
- 专利标题: Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof
- 专利标题(中): 用于集成电路的封装的MEMS带通滤波器及其制造方法
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申请号: US09840264申请日: 2001-04-23
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公开(公告)号: US06399406B2公开(公告)日: 2002-06-04
- 发明人: Kevin K. Chan , Christopher Jhanes , Leathen Shi , James L. Speidell , James F. Ziegler
- 申请人: Kevin K. Chan , Christopher Jhanes , Leathen Shi , James L. Speidell , James F. Ziegler
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electromechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.
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