发明授权
- 专利标题: Semiconductor wafer processing tapes
- 专利标题(中): 半导体晶圆加工带
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申请号: US09765230申请日: 2001-01-18
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公开(公告)号: US06478918B2公开(公告)日: 2002-11-12
- 发明人: Richard E. Bennett , Louis E. Winslow , Greggory S. Bennett , Karunasena A. Alahapperuma , Cheryl L. Moore
- 申请人: Richard E. Bennett , Louis E. Winslow , Greggory S. Bennett , Karunasena A. Alahapperuma , Cheryl L. Moore
- 主分类号: H01L21784
- IPC分类号: H01L21784
摘要:
A semiconductor wafer processing tape includes a permanent backing and a layer of a nonpressure sensitive adhesive. The tapes are useful for wafer grinding and/or wafer dicing applications. The nonpressure sensitive adhesive includes a copolymer of at least one of a first monoethylenically unsaturated monomer, at least one of a second monoethylenically unsaturated monomer, and at least one copolymerizable nonionic crosslinking agent; wherein the second monoethylenically unsaturated monomer is a reinforcing monomer having a homopolymer glass transition temperature higher than that of the first monoethylenically unsaturated monomer. A method of processing semiconductor wafers is also provided.
公开/授权文献
- US20010016257A1 Semiconductor wafer processing tapes 公开/授权日:2001-08-23
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