发明授权
US06518783B1 Circuit construction in back side of die and over a buried insulator
失效
模具背面的电路结构和埋地绝缘子上方
- 专利标题: Circuit construction in back side of die and over a buried insulator
- 专利标题(中): 模具背面的电路结构和埋地绝缘子上方
-
申请号: US09864669申请日: 2001-05-23
-
公开(公告)号: US06518783B1公开(公告)日: 2003-02-11
- 发明人: Jeffrey D. Birdsley , Michael R. Bruce , Brennan V. Davis , Rosalinda M. Ring , Daniel L. Stone , Rama R. Goruganthu
- 申请人: Jeffrey D. Birdsley , Michael R. Bruce , Brennan V. Davis , Rosalinda M. Ring , Daniel L. Stone , Rama R. Goruganthu
- 主分类号: H01L2166
- IPC分类号: H01L2166
摘要:
According to an example embodiment of the present invention, a semiconductor die having a buried insulator layer between a circuit side and a back side is selectively thinned. During thinning, a selected portion of the bulk silicon layer on the back side is removed and a void created. A circuit is formed in the void and is coupled to the existing circuitry on the circuit side of the die. The new circuit is used to analyze the die during operation, testing, or other conditions. The newly formed circuit enhances the ability to analyze the semiconductor die by adding flexibility to the traditional analysis methods used for integrated circuit dice. The newly formed circuit enables many new ways of interactively using the existing circuitry some of which include replacement of defective circuitry, modification of existing circuit operations, and stimulation of existing circuitry for testing.
信息查询