发明授权
US06533908B1 Device and method for coating substrates in a vacuum utilizing an absorber electrode 有权
使用吸收电极在真空中涂布基板的装置和方法

  • 专利标题: Device and method for coating substrates in a vacuum utilizing an absorber electrode
  • 专利标题(中): 使用吸收电极在真空中涂布基板的装置和方法
  • 申请号: US09763636
    申请日: 2001-03-12
  • 公开(公告)号: US06533908B1
    公开(公告)日: 2003-03-18
  • 发明人: Carl-Friedrich MeyerHans-Joachim Scheibe
  • 申请人: Carl-Friedrich MeyerHans-Joachim Scheibe
  • 优先权: DE19838827 19980826; DE19850218 19981031
  • 主分类号: C23C1454
  • IPC分类号: C23C1454
Device and method for coating substrates in a vacuum utilizing an absorber electrode
摘要:
The invention relates to a device and method for coating substrates in a vacuum, wherein a plasma is to be generated from a target and ionized particles of the plasma are to be deposited on the substrate in the form of a layer, as has long been used in a very wide range of known PVD processes. The intention of the invention is to prevent droplets and particles from settling in the applied layer, which droplets and particles have an adverse effect on the properties of the layer, or at least to reduce the number of these droplets and particles. To solve this problem, an absorber electrode which is at an electrically positive potential is used, which electrode is a few mm away from the root of the plasma, and is arranged in front of or next to the plasma in such a way and is shaped in such a way that an electric field is formed around the absorber electrode. The electric field vector is to be oriented at least approximately orthogonally to the direction of movement of the ionized particles of the plasma.
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