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公开(公告)号：US06558757B1
公开(公告)日：2003-05-06
申请号：US09763650
申请日：2001-03-19
IPC分类号： H05H124
摘要： The invention relates to a method and a device for coating substrates in a vacuum, in which a plasma is generated from a target using a laser beam and ionized particles of the plasma are deposited on the substrate in the form of a layer, inert reactive gas or a gas mixture being supplied. The solution according to the invention is intended to provide a possible way of supplying gases or gas mixtures in a locally and temporally defined manner. According to the invention, this object is achieved by the fact that the gas or gas mixture is supplied to the plasma from and/or through a porous target, the intention being that the target is to have a temporary storage function on account of its porosity.
摘要翻译： 本发明涉及一种用于在真空中涂覆基板的方法和装置，其中使用激光束从靶产生等离子体，等离子体的离子化颗粒以层的形式沉积在基板上，惰性反应气体 或供应的气体混合物。 根据本发明的解决方案旨在提供以局部和时间上限定的方式供应气体或气体混合物的可能方式。 根据本发明，该目的是通过将气体或气体混合物从多孔靶向和/或通过多孔靶提供给等离子体而实现的，其意图在于目标由于其孔隙度而具有暂时的储存功能 。
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2.发明授权Device and method for coating substrates in a vacuum utilizing an absorber electrode 有权使用吸收电极在真空中涂布基板的装置和方法公开(公告)号：US06533908B1
公开(公告)日：2003-03-18
申请号：US09763636
申请日：2001-03-12
IPC分类号： C23C1454
CPC分类号： H01J37/32055 , H01J2237/022
摘要： The invention relates to a device and method for coating substrates in a vacuum, wherein a plasma is to be generated from a target and ionized particles of the plasma are to be deposited on the substrate in the form of a layer, as has long been used in a very wide range of known PVD processes. The intention of the invention is to prevent droplets and particles from settling in the applied layer, which droplets and particles have an adverse effect on the properties of the layer, or at least to reduce the number of these droplets and particles. To solve this problem, an absorber electrode which is at an electrically positive potential is used, which electrode is a few mm away from the root of the plasma, and is arranged in front of or next to the plasma in such a way and is shaped in such a way that an electric field is formed around the absorber electrode. The electric field vector is to be oriented at least approximately orthogonally to the direction of movement of the ionized particles of the plasma.
摘要翻译： 本发明涉及一种用于在真空中涂覆基板的装置和方法，其中将从靶产生等离子体，等离子体的离子化的颗粒将以层的形式沉积在基板上，如早已使用 在非常广泛的已知PVD工艺中。 本发明的目的是防止液滴和颗粒沉积在施加的层中，这些液滴和颗粒对该层的性质具有不利影响，或至少减少这些液滴和颗粒的数量。 为了解决这个问题，使用处于正电位的吸收体电极，该电极距离等离子体的根部几毫米，并且以这样的方式布置在等离子体的前面或旁边，并且成形 以这样的方式在吸收体电极周围形成电场。 电场矢量至少大致与等离子体的电离粒子的运动方向垂直。
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公开(公告)号：US06788187B2
公开(公告)日：2004-09-07
申请号：US10432133
申请日：2003-06-05
IPC分类号： H01C1030
CPC分类号： H01C10/308 , H01C10/305
摘要： The invention relates to an electric resistance element, which can be electromechanically regulated. A layer of a predeterminable width and thickness, consisting of an electrically conductive material with a constant specific electric resistance, is located on a substrate. At least one electric contact connection is also provided and an electric contact element can be displaced mechanically along the surface of said layer. The aim of the invention is to provide an appropriate resistance element that can be produced cost-effectively, with reproducible electric characteristics and a high resistance to wear, without a requirement for additional lubrication. To achieve this, according to the invention, a wear-resistant layer of uniform thickness is configured on the electrically condutive layer situated on the substrate. Said layer consists exclusively of a carbon similar to diamond and has a higher specific electric resistance than that of the layer. The layer of carbon similar to diamond thus lies in contact with the mechanically displaceable contact element.
摘要翻译： 本发明涉及一种可以机电调节的电阻元件。 由具有恒定比电阻的导电材料组成的可预定宽度和厚度的层位于基板上。 还提供至少一个电接触连接，并且电接触元件可以沿着所述层的表面机械移位。 本发明的目的是提供一种合适的电阻元件，其可以经济高效地制造，具有可再现的电特性和高耐磨性，而不需要额外的润滑。 为了实现这一点，根据本发明，在位于基板上的电性调节层上配置均匀厚度的耐磨层。 所述层仅由类似于金刚石的碳组成，并且具有比该层更高的比电阻。 因此，与金刚石相似的碳层与机械可移动的接触元件接触。
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4.发明授权公开(公告)号：US06410125B1
公开(公告)日：2002-06-25
申请号：US09530963
申请日：2000-07-24
IPC分类号： B32B500
CPC分类号： C23C8/24 , C23C14/02 , C23C14/022 , C23C14/028 , C23C14/0605 , C23C14/325 , C23C26/02 , C23C28/322 , C23C28/324 , C23C28/343 , Y10T428/24942 , Y10T428/24975 , Y10T428/265 , Y10T428/30 , Y10T428/31678
摘要： The invention relates to a wear-resistant, highly stressed and low-friction boundary coating construction for titanium or the alloys thereof which can be advantageously used in order to protect human implants. According to the inventive boundary coating construction the boundary coating is comprised of a 200 to 400 nm thick DLC coating (4), a 5 to 50 nm thick intermediate coating (3) and a 0.3 to 2.0 mm thick gas alloyed coating (2), said gas alloyed coating having a hardness between 600 HV0.1 and 1,400 HV0.1. The inventive boundary coating construction is produced by firstly melting the surface of the member which is to be protected. The surface is then gas alloyed and cleaned in an N2/Ar atmosphere. Subsequently, the intermediate coating is first deposited followed by a depositing of the hard amorphous carbon coating by means of the laser-induced, pulsed vacuum arc (laser-arc) method.
摘要翻译： 本发明涉及用于钛或其合金的耐磨，高应力和低摩擦边界涂层结构，其可有利地用于保护人类植入物。 根据本发明的边界涂层结构，边界涂层由200至400nm厚的DLC涂层（4），5至50nm厚的中间涂层（3）和0.3至2.0mm厚的气体合金涂层（2）组成， 所述气体合金涂层的硬度为600HV0.1至1400HV0.1。 本发明的边界涂层结构通过首先熔化待保护的构件的表面来制造。 然后将表面气体合金化并在N 2 / Ar气氛中进行清洁。 随后，首先沉积中间涂层，然后通过激光诱导的脉冲真空电弧（激光弧）法沉积硬质无定形碳涂层。
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5.发明授权公开(公告)号：US06338778B1
公开(公告)日：2002-01-15
申请号：US09214764
申请日：1999-01-12
IPC分类号： C23C1432
CPC分类号： C23C14/28 , C23C14/325 , C23C14/564
摘要： The invention relates to a device, in particular for a laser-induced vacuum are discharge evaporator for depositing of multiple layers with a high level of purity and high deposition rates on large-area components. According to the invention, the material source for the coating material is in a source chamber which can be evacuated and can be separated in a vacuum-tight manner from the actual coating chamber in which the substrate to be coated is located. The evaporator can, in particular, be used for deposition of amorphous carbon layers which are hydrogen-free and superhard and/or which contain hydrogen, in conjunction with high-purity metal layers or for the reactive plasma-enhanced deposition of, for example, oxidic, carbide, nitride hard material layers of ceramic layers or a combination thereof. The corresponding plasma sources can be flange-mounted on any suitable coating chambers and, consequently, also combined with conventional coating processes, for example magnetron sputtering.
摘要翻译： 本发明涉及一种装置，特别是用于激光诱发真空的装置，是用于在大面积部件上以高纯度和高沉积速率沉积多层的放电蒸发器。 根据本发明，用于涂料的材料源在源腔室中，其可被抽真空并且可以以真空密封的方式从待涂覆的基底所在的实际涂覆室分离。 特别地，蒸发器可用于沉积无氢和超硬和/或含有氢的无定形碳层，结合高纯度金属层或用于例如反应性等离子体增强沉积， 氧化物，碳化物，氮化物硬质材料层或其组合。 相应的等离子体源可以法兰安装在任何合适的涂层室上，并因此也与传统的涂覆工艺（例如磁控溅射）组合。
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公开(公告)号：US09267542B2
公开(公告)日：2016-02-23
申请号：US14008806
申请日：2012-03-28
申请人： Hans-Joachim Scheibe , Michael Leonhardt , Andreas Leson , Werner Hufenbach , Manuela Andrich , Klaus Kunze
发明人： Hans-Joachim Scheibe , Michael Leonhardt , Andreas Leson , Werner Hufenbach , Manuela Andrich , Klaus Kunze
CPC分类号： F16C33/043 , C08J5/10 , C08J5/24 , F16C3/026 , F16C3/035 , F16C33/201 , F16C2206/04 , F16C2350/54 , F16H55/06
摘要： The invention relates to a system of sliding elements which are formed by a base body and a counter-body. It is the object of the invention to provide a system of sliding element comprising a base body and a counter-body which has a reduced mass with a sufficient strength and which achieves improved properties of friction and wear. The system of sliding elements in accordance with the invention is formed by a counter-body and a base body as friction partners. The base body is formed from a fiber-reinforced polymer material and the counter-body is coated with diamond-like carbon at the surface subject to friction. At least the base body is formed from a textile-reinforced polymer matrix structure.
摘要翻译： 本发明涉及一种由基体和对体形成的滑动元件系统。 本发明的目的是提供一种滑动元件系统，其包括具有足够强度的具有减小的质量并且实现改进的摩擦和磨损性能的基体和对体。 根据本发明的滑动元件的系统由作为摩擦伴侣的反体和基体形成。 基体由纤维增强聚合物材料形成，并且相对体在受摩擦的表面上涂覆有类金刚石碳。 至少基体由纺织增强聚合物基体结构形成。
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公开(公告)号：US20130045367A1
公开(公告)日：2013-02-21
申请号：US13548550
申请日：2012-07-13
CPC分类号： C23C14/0021 , C23C14/0605 , C23C14/325 , Y10T428/24529 , Y10T428/2495 , Y10T428/24975 , Y10T428/265 , Y10T428/30
摘要： A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.
摘要翻译： 基于金刚石样的涂层由多个彼此交替形成的类金刚石碳膜形成，并且在这方面形成其中不含有部分或仅含有较低部分掺杂氟的膜。 在其上交替地形成有氟或至少具有比其下面布置的膜更高的氟的膜的膜。 可以通过使用纯碳的目标来制造涂层。 通过PVD工艺将膜沉积在衬底的表面上，其中部分氟以掺杂形式包含。 通过改变作为前体的氟/碳化合物或硫/氟化合物的供给体积流动来交替地形成膜。
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公开(公告)号：US20110300310A1
公开(公告)日：2011-12-08
申请号：US13178157
申请日：2011-07-07
CPC分类号： C23C14/04 , C23C14/044 , C23C14/505
摘要： A method and system for coating the functional surfaces of symmetrically serrated components, in particular the tooth flanks of gears, includes a coating source emitting coating material in the form of electrically charged particles in the direction of a revolving component. A high-quality functional surface coating of the component is achieved in that a shield is arranged in the beam path between the component and the coating source transversely to the irradiation direction, which shields the component from the coating beam in a contour area with a functional surface orientation inclined flatly with respect to the irradiation direction.
摘要翻译： 用于涂覆对称锯齿状部件，特别是齿轮齿面的功能表面的方法和系统包括沿旋转部件的方向以带电粒子的形式发射涂覆材料的涂层源。 实现了组件的高质量功能表面涂层，其中屏蔽件布置在横向于照射方向的部件和涂层源之间的光束路径中，该部件与涂覆源在具有功能的轮廓区域中的涂层光束屏蔽 表面取向相对于照射方向平坦地倾斜。
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公开(公告)号：US20070224242A1
公开(公告)日：2007-09-27
申请号：US11688655
申请日：2007-03-20
IPC分类号： A61F2/06
CPC分类号： A61F2/30767 , A61B17/14 , A61B17/3211 , A61B17/7062 , A61B17/866 , A61F2/3094 , A61F2/30965 , A61F2/32 , A61F2/34 , A61F2/36 , A61F2/3662 , A61F2/367 , A61F2/3676 , A61F2/3804 , A61F2/3868 , A61F2/3886 , A61F2002/30014 , A61F2002/30016 , A61F2002/30037 , A61F2002/30685 , A61F2002/30929 , A61F2002/30934 , A61F2002/3098 , A61F2002/30981 , A61F2002/3611 , A61F2002/3625 , A61F2002/3631 , A61F2250/0018 , A61F2250/0019 , A61F2310/00017 , A61F2310/00023 , A61F2310/00029 , A61F2310/00395 , A61F2310/00407 , A61F2310/00449 , A61F2310/00491 , A61F2310/00544 , A61F2310/00574 , A61F2310/0058 , A61F2310/0073 , A61F2310/00856 , A61L27/303 , A61L27/306 , C23C28/044 , C23C28/046 , C23C28/048 , C23C30/00
摘要： A medical device, such as an orthopedic or prosthetic joint, has a protective coating bonded to the substrate material of the device. Suitable substrate materials may include pure metals and metal alloys, ceramics, polymers and composites of the above. The protective coating includes a thin layer of tetrahedral bonded Carbon (ta-C). The coating also optionally includes an interface layer to facilitate the initial bonding and retention of the ta-C layer, such as by acting as an adhesion promoter, fluid barrier layer, or coefficient of thermal expansion mismatch reducing layer, or combination thereof. The interface layer may include various tightly adherent metals and metal nitrides, such as Cr, Ti, Nb, Ta and carbides, nitrides and carbonitrides thereof. The ta-C layer has a concentration of sp3 bonded carbon which varies through its thickness. Many concentration profiles of sp3 carbon bonds through the thickness are possible. The ta-C layer may also be doped with various materials, either through its thickness, or at either an inner or an outer interface, or both. The doping may include any suitable dopant, including various pure metals or metal alloys, bone growth substances, and dopants which alter the tribology of the ta-C layer with respect to the fluids in which it is in contact, such as dopants comprising F and N, or combinations of these materials.
摘要翻译： 诸如矫形或假体关节之类的医疗装置具有粘合到该装置的基底材料上的保护性涂层。 合适的基底材料可以包括上述的纯金属和金属合金，陶瓷，聚合物和复合材料。 保护涂层包括四面体结合碳（ta-C）的薄层。 涂层还可选地包括界面层，以促进ta-C层的初始粘合和保留，例如通过作为粘合促进剂，流体阻挡层或热膨胀失配还原层系数或其组合。 界面层可以包括各种紧密附着的金属和金属氮化物，例如Cr，Ti，Nb，Ta和碳化物，氮化物和碳氮化物。 ta-C层具有通过其厚度变化的sp 3键合碳的浓度。 通过厚度的sp3碳键的许多浓度分布是可能的。 ta-C层也可以通过其厚度，或者在内部或外部界面处，或两者都可以掺杂各种材料。 掺杂可以包括任何合适的掺杂剂，包括各种纯金属或金属合金，骨生长物质和掺杂剂，其改变ta-C层相对于其接触的流体的摩擦学，例如包含F和 N或这些材料的组合。
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公开(公告)号：US08911868B2
公开(公告)日：2014-12-16
申请号：US13548550
申请日：2012-07-13
CPC分类号： C23C14/0021 , C23C14/0605 , C23C14/325 , Y10T428/24529 , Y10T428/2495 , Y10T428/24975 , Y10T428/265 , Y10T428/30
摘要： A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.
摘要翻译： 基于金刚石样的涂层由多个彼此交替形成的类金刚石碳膜形成，并且在这方面形成其中不含有部分或仅含有较低部分掺杂氟的膜。 在其上交替地形成有氟或至少具有比其下面布置的膜更高的氟的膜的膜。 可以通过使用纯碳的目标来制造涂层。 通过PVD工艺将膜沉积在衬底的表面上，其中部分氟以掺杂形式包含。 通过改变作为前体的氟/碳化合物或硫/氟化合物的供给体积流动来交替地形成膜。
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