发明授权
US06538861B1 MAGNETORESISTIVE HEAD HAVING FERROMAGNETIC TUNNEL JUNCTION FILM WITH A SMALLER RESISTANCE AT A TERMINAL PORTION THAN A CENTRAL PORTION, MAGNETIC RESISTANCE DETECTION SYSTEM WITH THE MAGNETORESISTIVE HEAD AND A MAGNETIC STORAGE SYSTEM USING IT
有权
具有终端部分的电阻较小的中央部分,具有磁阻头的磁阻电阻检测系统和使用其的磁性存储系统的磁致伸缩膜
- 专利标题: MAGNETORESISTIVE HEAD HAVING FERROMAGNETIC TUNNEL JUNCTION FILM WITH A SMALLER RESISTANCE AT A TERMINAL PORTION THAN A CENTRAL PORTION, MAGNETIC RESISTANCE DETECTION SYSTEM WITH THE MAGNETORESISTIVE HEAD AND A MAGNETIC STORAGE SYSTEM USING IT
- 专利标题(中): 具有终端部分的电阻较小的中央部分,具有磁阻头的磁阻电阻检测系统和使用其的磁性存储系统的磁致伸缩膜
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申请号: US09597458申请日: 2000-06-19
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公开(公告)号: US06538861B1公开(公告)日: 2003-03-25
- 发明人: Kazuhiko Hayashi , Masafumi Nakada , Eizo Fukami , Kiyokazu Nagahara , Hiroaki Honjou , Kunihiko Ishihara , Tamaki Toba , Hisanao Tsuge , Atsushi Kamijo
- 申请人: Kazuhiko Hayashi , Masafumi Nakada , Eizo Fukami , Kiyokazu Nagahara , Hiroaki Honjou , Kunihiko Ishihara , Tamaki Toba , Hisanao Tsuge , Atsushi Kamijo
- 优先权: JP11-171661 19990617
- 主分类号: G11B539
- IPC分类号: G11B539
摘要:
A magnetoresistive head whose operation depends on a magnetoresistive effect is configured using a ferromagnetic tunnel junction (MTJ) film, which is arranged between a lower electrode and an upper electrode. The ferromagnetic tunnel junction film is basically configured using a set of a free layer, a barrier layer and a fixing layer, which are sequentially formed and laminated on the lower electrode. Herein, the ferromagnetic tunnel junction film is designed to avoid electrostatic destruction in manufacture by prescribed measures. For example, the barrier layer is reduced in thickness at a terminal portion as compared with a center portion. Or, the barrier layer has a defect at the terminal portion. In addition, it is possible to provide a conductor in connection with the barrier layer in proximity to its terminal portion. Further, it is possible to attach re-adhesive substance, which is produced by milling for patterning of the ferromagnetic tunnel junction film, to a specific terminal surface of the ferromagnetic tunnel junction film which is opposite to an ABS plane. Those measures provide a bypass allowing overcurrent release between the free layer and fixing layer. Moreover, adjustment milling or plasma oxidation is employed to control an amount of the re-adhesive substance being attached to the terminal surface of the ferromagnetic tunnel junction film. Thus, by adequately optimizing the amount of the re-adhesive substance, it is possible to improve yield in manufacturing the magnetoresistive heads.
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