公开(公告)号：US06538861B1

公开(公告)日：2003-03-25

申请号：US09597458

申请日：2000-06-19

申请人： Kazuhiko Hayashi ,  Masafumi Nakada ,  Eizo Fukami ,  Kiyokazu Nagahara ,  Hiroaki Honjou ,  Kunihiko Ishihara ,  Tamaki Toba ,  Hisanao Tsuge ,  Atsushi Kamijo

发明人： Kazuhiko Hayashi ,  Masafumi Nakada ,  Eizo Fukami ,  Kiyokazu Nagahara ,  Hiroaki Honjou ,  Kunihiko Ishihara ,  Tamaki Toba ,  Hisanao Tsuge ,  Atsushi Kamijo

IPC分类号： G11B539

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3903 ,  G11B5/3909 ,  G11B5/3967 ,  H01F10/3254

摘要： A magnetoresistive head whose operation depends on a magnetoresistive effect is configured using a ferromagnetic tunnel junction (MTJ) film, which is arranged between a lower electrode and an upper electrode. The ferromagnetic tunnel junction film is basically configured using a set of a free layer, a barrier layer and a fixing layer, which are sequentially formed and laminated on the lower electrode. Herein, the ferromagnetic tunnel junction film is designed to avoid electrostatic destruction in manufacture by prescribed measures. For example, the barrier layer is reduced in thickness at a terminal portion as compared with a center portion. Or, the barrier layer has a defect at the terminal portion. In addition, it is possible to provide a conductor in connection with the barrier layer in proximity to its terminal portion. Further, it is possible to attach re-adhesive substance, which is produced by milling for patterning of the ferromagnetic tunnel junction film, to a specific terminal surface of the ferromagnetic tunnel junction film which is opposite to an ABS plane. Those measures provide a bypass allowing overcurrent release between the free layer and fixing layer. Moreover, adjustment milling or plasma oxidation is employed to control an amount of the re-adhesive substance being attached to the terminal surface of the ferromagnetic tunnel junction film. Thus, by adequately optimizing the amount of the re-adhesive substance, it is possible to improve yield in manufacturing the magnetoresistive heads.

摘要翻译： 使用布置在下电极和上电极之间的铁磁隧道结（MTJ）膜来构造其磁阻效应的操作的磁阻头。 铁磁隧道结膜基本上是使用一组自由层，阻挡层和固定层构成的，它们依次形成并层压在下电极上。 这里，铁磁隧道结膜被设计成通过规定的措施避免制造中的静电破坏。 例如，与中心部分相比，阻挡层在端子部分的厚度减小。 或者，阻挡层在端子部分具有缺陷。 此外，可以在其端子部分附近提供与阻挡层相关的导体。 此外，可以将通过研磨制造的用于图案化铁磁性隧道结膜的再粘合物质附着到与ABS平面相反的铁磁性隧道结膜的特定末端表面。 这些措施提供了允许在自由层和固定层之间过电流释放的旁路。 此外，调整研磨或等离子体氧化被用于控制附着到铁磁性隧道结膜的终端表面上的再粘合物质的量。 因此，通过充分优化再粘合物质的量，可以提高制造磁阻磁头的成品率。

公开(公告)号：US07023659B2

公开(公告)日：2006-04-04

申请号：US10815069

申请日：2004-03-31

申请人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

发明人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

IPC分类号： G11B5/147

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/00 ,  G11B5/3103 ,  G11B5/3109 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3163 ,  G11B5/3967 ,  G11B5/40 ,  G11B2005/3996 ,  Y10T29/49044

摘要： By inserting a first antistripping layer comprising a first non-magnetic layer 22 and a first conductive layer 23 between a first magnetic layer 16 and a magnetic separation layer 13, adhesion between the first conductive layer 23 and the magnetic separation layer 13 is improved to prevent the first magnetic layer 16 from stripping. In addition, by inserting a second antistripping layer comprising a second non-magnetic layer 24 and a second conductive layer 25 between a second magnetic layer 21 and a magnetic gap layer 17, adhesion between the second conductive layer 24 and the magnetic gap layer 17 is improved to prevent the second magnetic layer 25 from stripping.

公开(公告)号：US20060119982A1

公开(公告)日：2006-06-08

申请号：US11329919

申请日：2006-01-10

申请人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

发明人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

IPC分类号： G11B5/147

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/00 ,  G11B5/3103 ,  G11B5/3109 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3163 ,  G11B5/3967 ,  G11B5/40 ,  G11B2005/3996 ,  Y10T29/49044

摘要： By inserting a first antistripping layer comprising a first non-magnetic layer 22 and a first conductive layer 23 between a first magnetic layer 16 and a magnetic separation layer 13, adhesion between the first conductive layer 23 and the magnetic separation layer 13 is improved to prevent the first magnetic layer 16 from stripping. In addition, by inserting a second antistripping layer comprising a second non-magnetic layer 24 and a second conductive layer 25 between a second magnetic layer 21 and a magnetic gap layer 17, adhesion between the second conductive layer 24 and the magnetic gap layer 17 is improved to prevent the second magnetic layer 25 from stripping.

摘要翻译： 通过在第一磁性层16和磁分离层13之间插入包括第一非磁性层22和第一导电层23的第一抗锯齿层，改善了第一导电层23和磁性分离层13之间的粘附，以防止 来自剥离的第一磁性层16。 此外，通过在第二磁性层21和磁隙层17之间插入包括第二非磁性层24和第二导电层25的第二抗锯齿层，第二导电层24和磁隙层17之间的粘附是 改进以防止第二磁性层25剥离。

公开(公告)号：US06791794B2

公开(公告)日：2004-09-14

申请号：US10113608

申请日：2002-04-01

申请人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihino Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

发明人： Hiroaki Honjo ,  Tsutomu Ishi ,  Mikiko Saito ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihino Nonaka ,  Kazuhiko Hayashi ,  Nobuyuki Ishiwata

IPC分类号： G11B5147

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/00 ,  G11B5/3103 ,  G11B5/3109 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3163 ,  G11B5/3967 ,  G11B5/40 ,  G11B2005/3996 ,  Y10T29/49044

摘要： By inserting a first antistripping layer comprising a first non-magnetic layer 22 and a first conductive layer 23 between a first magnetic layer 16 and a magnetic separation layer 13, adhesion between the first conductive layer 23 and the magnetic separation layer 13 is improved to prevent the first magnetic layer 16 from stripping. In addition, by inserting a second antistripping layer comprising a second non-magnetic layer 24 and a second conductive layer 25 between a second magnetic layer 21 and a magnetic gap layer 17, adhesion between the second conductive layer 24 and the magnetic gap layer 17 is improved to prevent the second magnetic layer 25 from stripping.

摘要翻译： 通过在第一磁性层16和磁分离层13之间插入包括第一非磁性层22和第一导电层23的第一抗锯齿层，改善了第一导电层23和磁性分离层13之间的粘附，以防止 来自剥离的第一磁性层16。 此外，通过在第二磁性层21和磁隙层17之间插入包括第二非磁性层24和第二导电层25的第二抗锯齿层，第二导电层24和磁隙层17之间的粘附是 改进以防止第二磁性层25剥离。

公开(公告)号：US06687082B1

公开(公告)日：2004-02-03

申请号：US09676788

申请日：2000-10-02

申请人： Nobuyuki Ishiwata ,  Tsutomu Ishi ,  Mikiko Saito ,  Hiroaki Honjo ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka

发明人： Nobuyuki Ishiwata ,  Tsutomu Ishi ,  Mikiko Saito ,  Hiroaki Honjo ,  Shinsaku Saito ,  Tamaki Toba ,  Yoshihiro Nonaka

IPC分类号： G11B5147

CPC分类号： G11B5/3153 ,  G11B5/3163 ,  Y10T29/49044

摘要： A magnetic head and a manufacturing method of the magnetic head and a magnetic recording and reproducing apparatus used this head, in which the following problem is solved, are provided. A plated film realizing large saturation magnetization Bs about 2T can not realize a high resistivity at the same time, therefore, when this plated film is applied to a magnetic head, the high frequency characteristic is deteriorated. This problem is solved at the present invention. Further, the present invention provides a magnetic head that is low cost and has large saturation magnetization Bs, and has a excellent high frequency characteristic suitable for a high density recording. A magnetic head, in which a coil insulated by insulation layers is disposed between a first magnetic core for recording and a second magnetic core for recording that is disposed to face the first magnetic core for recording via a recording gap, and which executes recording by that a magnetic flux of the first and second magnetic cores for recording excited by the coil is generated from the recording gap, is provided. And at least one of the first and second magnetic cores for recording is composed of a first plated magnetic layer and a second plated magnetic layer in a state that the first plated magnetic layer is disposed at the near side of the recording gap, and saturation magnetization of the first plated magnetic layer is 1.7 T (tesla) or more. And when resistivity of the first plated magnetic layer is defined as &rgr;1 and the thickness of the first plated magnetic layer is defined as &dgr;1, and resistivity of the second plated magnetic layer is defined as &rgr;2, and the thickness of the second plated magnetic layer is defined as &dgr;2, &rgr;1

摘要翻译： 提供了磁头和磁头的制造方法以及使用该磁头的磁记录和再现装置，其中解决了以下问题。 实现大约2T的饱和磁化强度Bs的电镀膜不能同时实现高电阻率，因此当将该镀膜施加到磁头时，高频特性劣化。 在本发明中解决了这个问题。 此外，本发明提供一种低成本，饱和磁化强度高的磁头，并且具有优良的高密度记录特性。 一种磁头，其中通过绝缘层绝缘的线圈被设置在用于记录的第一磁芯和用于记录的第二磁芯之间，用于记录的第二磁芯经由记录间隙设置成面对第一磁芯进行记录，并且执行记录 提供了从记录间隙产生由线圈激发的记录的第一和第二磁芯的磁通量。 并且，第一和第二记录用磁芯中的至少一个由第一镀层磁性层和第二镀覆磁性层构成，第一镀层磁性层设置在记录间隙的近侧，饱和磁化强度 的第一镀层磁性层为1.7T（特斯拉）或更高。 并且，将第一镀层磁性层的电阻率定义为rho1，将第一镀覆磁性层的厚度定义为δ1，将第二镀覆磁性层的电阻率定义为rho2，将第二镀覆磁性层的厚度设为 定义为δ2，rho1

公开(公告)号：US5371582A

公开(公告)日：1994-12-06

申请号：US99450

申请日：1993-07-30

申请人： Tamaki Toba ,  Atsuko Ohkawa ,  Yasuo Hira ,  Masayasu Fujisawa ,  Isao Hashimoto

发明人： Tamaki Toba ,  Atsuko Ohkawa ,  Yasuo Hira ,  Masayasu Fujisawa ,  Isao Hashimoto

IPC分类号： G01B11/06 ,  G01B11/22 ,  G02B5/18

CPC分类号： G01B11/0675 ,  G01B11/22

摘要： A thickness/depth measuring apparatus and method for measuring the thickness of a film forming a lattice-shaped mask and the depth of a groove formed on a workpiece during processing of the workpiece. The thickness/depth measuring apparatus and method provide for irradiating the workpiece with a coherent light beam, controlling the direction for linear polarization of the coherent light beam irradiated onto the workpiece, adjusting the incident angle of the coherent light beam irradiated onto the workpiece in a predetermined angular range, receiving and detecting reflected light reflected by the workpiece at different irradiated incident angles and including higher-order diffracted light; and calculating the thickness of the film and the depth of the groove in accordance with the intensity of the diffracted light detected.

摘要翻译： 用于测量形成格子状掩模的膜的厚度和在工件加工期间在工件上形成的凹槽的深度的厚度/深度测量装置和方法。 厚度/深度测量装置和方法提供用相干光束照射工件，控制照射到工件上的相干光束的线性偏振的方向，调节照射到工件上的相干光束的入射角 预定的角度范围，以不同的照射入射角接收和检测被工件反射的反射光，并包括高阶衍射光; 并且根据所检测的衍射光的强度来计算膜的厚度和凹槽的深度。

公开(公告)号：US20060114608A1

公开(公告)日：2006-06-01

申请号：US11333897

申请日：2006-01-18

申请人： Shinsaku Saitho ,  Haruo Urai ,  Nobuyuki Ishiwata ,  Kiyotaka Shimabayashi ,  Yoshihiro Nonaka ,  Tamaki Toba

发明人： Shinsaku Saitho ,  Haruo Urai ,  Nobuyuki Ishiwata ,  Kiyotaka Shimabayashi ,  Yoshihiro Nonaka ,  Tamaki Toba

IPC分类号： G11B5/147

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313

摘要： To accurately decrease the gap depth between an upper pole layer and a lower pole layer and the front-end portion width of the upper pole layer. A thin-film magnetic head of the present invention is constituted by forming a lower shielding layer, a read gap layer holding an MR magnetosensitive element, a common pole layer, and a write gap layer in order on an insulating substrate, forming a first flattening layer, a coil pattern layer, and a second flattening layer laminated in order on the write gap layer excluding the vicinity of an ABS plane, and forming an upper pole layer on the write gap layer and the second flattening layer nearby an ABS plane. Moreover, a concave portion is formed on the common pole layer at a position separated from the ABS plane, the concave portion is filled with a nonmagnetic body, and the gap depth between the upper pole layer and the common pole layer is determined by the concave portion.

公开(公告)号：US07054107B2

公开(公告)日：2006-05-30

申请号：US10375239

申请日：2003-02-27

申请人： Shinsaku Saitho ,  Haruo Urai ,  Nobuyuki Ishiwata ,  Kiyotaka Shimabayashi ,  Yoshihiro Nonaka ,  Tamaki Toba

发明人： Shinsaku Saitho ,  Haruo Urai ,  Nobuyuki Ishiwata ,  Kiyotaka Shimabayashi ,  Yoshihiro Nonaka ,  Tamaki Toba

IPC分类号： G11B5/147

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313

摘要： To accurately decrease the gap depth between an upper pole layer and a lower pole layer and the front-end portion width of the upper pole layer.A thin-film magnetic head of the present invention is constituted by forming a lower shielding layer, a read gap layer holding an MR magnetosensitive element, a common pole layer, and a write gap layer in order on an insulating substrate, forming a first flattening layer, a coil pattern layer, and a second flattening layer laminated in order on the write gap layer excluding the vicinity of an ABS plane, and forming an upper pole layer on the write gap layer and the second flattening layer nearby an ABS plane. Moreover, a concave portion is formed on the common pole layer at a position separated from the ABS plane, the concave portion is filled with a nonmagnetic body, and the gap depth between the upper pole layer and the common pole layer is determined by the concave portion.

摘要翻译： 为了精确地减小上极层和下极层之间的间隙深度和上极层的前端部宽度。 本发明的薄膜磁头通过在绝缘基板上依次形成下屏蔽层，保持MR磁敏元件，公共极层和写间隙层的读取间隙层，形成第一扁平化 层，线圈图案层和在除了ABS平面附近的写入间隙层上顺序层叠的第二平坦化层，并且在ABS平面附近的写间隙层和第二平坦化层上形成上极层。 此外，在与ABS平面分离的位置处，在公共极层上形成凹部，凹部填充有非磁性体，上极层和公共极层之间的间隙深度由凹部 一部分。

公开(公告)号：US07042319B2

公开(公告)日：2006-05-09

申请号：US10486687

申请日：2002-08-15

申请人： Nobuyuki Ishiwata ,  Hiroaki Honjo ,  Tamaki Toba ,  Shinsaku Saito ,  Keishi Ohashi

发明人： Nobuyuki Ishiwata ,  Hiroaki Honjo ,  Tamaki Toba ,  Shinsaku Saito ,  Keishi Ohashi

IPC分类号： H01H51/22

CPC分类号： H01H50/005 ,  H01F7/08 ,  H01F2007/068

摘要： The present invention provided a thin-film electromagnet including a magnetic yoke and a thin-film coil, characterized in that the magnetic yoke includes a first magnetic yoke and a second magnetic yoke making contact with the first magnetic yoke, the first magnetic yoke is located at a center of a winding of the thin-film coil, and the second magnetic yoke is arranged above or below the thin-film coil such that the second magnetic yoke faces the thin-film coil, and overlaps at least a part of the thin-film coil.

摘要翻译： 本发明提供一种包括磁轭和薄膜线圈的薄膜电磁体，其特征在于，磁轭包括与第一磁轭接触的第一磁轭和第二磁轭，第一磁轭位于 在薄膜线圈的绕组的中心处，并且第二磁轭布置在薄膜线圈的上方或下方，使得第二磁轭面对薄膜线圈，并且与薄膜线圈的至少一部分重叠 薄膜线圈。

公开(公告)号：US5567333A

公开(公告)日：1996-10-22

申请号：US263915

申请日：1994-06-22

申请人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

发明人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

IPC分类号： B23K15/00 ,  C23F4/00 ,  G11B5/31 ,  G11B5/60 ,  H01L21/302 ,  H01L21/3065 ,  B44C1/22

CPC分类号： G11B5/3106 ,  G11B5/60 ,  G11B5/6005 ,  G11B5/3163

摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

摘要翻译： 磁头元件具有形成在其表面上的一个或多个轨道。 每个轨道形成为具有55°-85°的锥角。 为了形成轨道，进行离子铣削; 所使用的轨道基板允许倾斜角度为15°-60°并旋转; 并且作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）气体或者所述氟化烃气体与Ar，SF 6等的混合气体。 因此，磁头轨道形状在磁头和磁盘之间的飞行高度变化很小。