发明授权
US06541298B2 Method of making infrared sensor with a thermoelectric converting portion
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制造具有热电转换部的红外线传感器的方法
- 专利标题: Method of making infrared sensor with a thermoelectric converting portion
- 专利标题(中): 制造具有热电转换部的红外线传感器的方法
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申请号: US09964696申请日: 2001-09-28
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公开(公告)号: US06541298B2公开(公告)日: 2003-04-01
- 发明人: Yoshinori Iida , Keitaro Shigenaka , Naoya Mashio
- 申请人: Yoshinori Iida , Keitaro Shigenaka , Naoya Mashio
- 优先权: JP2000-298277 20000929
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
An infrared sensor including a substrate, a plurality of infrared detection pixels arrayed on a substrate with each of the infrared detection pixels including an infrared absorption portion formed over the substrate and configured to absorb infrared radiation, a thermoelectric converter portion formed over the substrate and configured to convert a temperature change in the infrared absorption portion into an electrical signal, and support structures configured to support the thermoelectric converter portion and the infrared absorption portion over the substrate via a separation space, the support structures having conductive interconnect layers configured to deliver the electrical signal from the thermoelectric converter portion to the substrate. The infrared sensor further includes a pixel selection circuit configured to select at least one of the infrared detection pixels which delivers the electrical signal and an output circuit configured to output the electrical signal delivered from selected infrared detection pixels via the conductive interconnect layers. The conductive interconnect layers include a material the same as a material of gate layers of the MOS transistors, and have a thickness similar to the gate layers.
公开/授权文献
- US20020039838A1 Infrared sensor and manufacturing method thereof 公开/授权日:2002-04-04
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