Invention Grant
- Patent Title: Resonator optics monitoring method
- Patent Title (中): 谐振器光学监测方法
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Application No.: US09769019Application Date: 2001-01-24
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Publication No.: US06542243B2Publication Date: 2003-04-01
- Inventor: Matthias Kramer
- Applicant: Matthias Kramer
- Main IPC: G01N2100
- IPC: G01N2100

Abstract:
A technique for testing the quality of optical components of a line-narrowing module is performed on-line. As the wavelength tends to drift from a desired value when the optical components of the line-narrowing module are heated due to absorption, one or more optical components is adjusted such as by rotation to tune the wavelength back to the desired wavelength using a feedback loop. The amount of adjustment of these optical components is monitored for indirectly measuring, and thereby testing, the absorption or quality of the optical components.
Public/Granted literature
- US20010033383A1 Resonator optics monitoring method Public/Granted day:2001-10-25
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