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US06542243B2 Resonator optics monitoring method 失效
谐振器光学监测方法

  • Patent Title: Resonator optics monitoring method
  • Patent Title (中): 谐振器光学监测方法
  • Application No.: US09769019
    Application Date: 2001-01-24
  • Publication No.: US06542243B2
    Publication Date: 2003-04-01
  • Inventor: Matthias Kramer
  • Applicant: Matthias Kramer
  • Main IPC: G01N2100
  • IPC: G01N2100
Resonator optics monitoring method
Abstract:
A technique for testing the quality of optical components of a line-narrowing module is performed on-line. As the wavelength tends to drift from a desired value when the optical components of the line-narrowing module are heated due to absorption, one or more optical components is adjusted such as by rotation to tune the wavelength back to the desired wavelength using a feedback loop. The amount of adjustment of these optical components is monitored for indirectly measuring, and thereby testing, the absorption or quality of the optical components.
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