Invention Grant
- Patent Title: Electron beam apparatus having traversing circuit boards
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Application No.: US09814373Application Date: 2001-03-21
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Publication No.: US06563124B2Publication Date: 2003-05-13
- Inventor: Lee Veneklasen , Vidhya Krishnamurthi , Gil Winograd
- Applicant: Lee Veneklasen , Vidhya Krishnamurthi , Gil Winograd
- Main IPC: H01J3706
- IPC: H01J3706

Abstract:
An electron beam apparatus is capable of registering an image on a substrate. The apparatus comprises a vacuum chamber having a wall. Electron beam source, modulator, and detector components are adapted to generate, modulate and detect an array of electron beams in the vacuum chamber. A circuit board passing through the wall of the vacuum chamber has a plurality of electrical traces to connect to the electron beam source, modulator, and detector components.
Public/Granted literature
- US20020134912A1 Electron beam apparatus having traversing circuit boards Public/Granted day:2002-09-26
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