- 专利标题: Microscopic geometry measuring device
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申请号: US09805309申请日: 2001-03-13
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公开(公告)号: US06604295B2公开(公告)日: 2003-08-12
- 发明人: Kunitoshi Nishimura , Kazuhiko Hidaka , Kiyokazu Okamoto
- 申请人: Kunitoshi Nishimura , Kazuhiko Hidaka , Kiyokazu Okamoto
- 优先权: JP2000-070216 20000314
- 主分类号: G01B520
- IPC分类号: G01B520
摘要:
A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).
公开/授权文献
- US20020124427A1 Microscopic geometry measuring device 公开/授权日:2002-09-12