Microscopic geometry measuring device

    公开(公告)号:US06604295B2

    公开(公告)日:2003-08-12

    申请号:US09805309

    申请日:2001-03-13

    IPC分类号: G01B520

    摘要: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

    Length measuring machine and method using laser beams
    2.
    发明授权
    Length measuring machine and method using laser beams 失效
    使用激光束的长度测量机和方法

    公开(公告)号:US6034773A

    公开(公告)日:2000-03-07

    申请号:US168967

    申请日:1998-10-09

    IPC分类号: G01B11/00 G01B9/02 G01B21/00

    CPC分类号: G01B9/02052

    摘要: There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.

    摘要翻译: 提供了不受空气波动或温度变化影响的长度测量机。 在结构上,沿长度方向形成刻度,并且还提供内置的光波干涉仪。 内置光波干涉仪测量结构的长度,并将数据提供给电流控制器。 为了将结构的长度与标称值协调一致,电流控制器向结构上提供的电阻器提供电流以引起结构的热膨胀,或者结构被冷却。

    Contact location detecting mechanism of touch signal probe
    3.
    发明授权
    Contact location detecting mechanism of touch signal probe 失效
    触摸信号探头接触位置检测机构

    公开(公告)号:US06307084B1

    公开(公告)日:2001-10-23

    申请号:US09477948

    申请日:2000-01-05

    IPC分类号: G01B7012

    CPC分类号: G01B7/012

    摘要: A contact location detecting mechanism (1) of a touch signal probe (10) includes a rotary motion generator (30) for scanningly moving a stylus (102) on a plane (A), a phase value detector (50) for detecting a phase value (&thgr;) indicating a rotation position of the scanning rotary motion, and a contact location detector (70)for detecting a contact location of a contact portion (102A) based on a detection signal value (V) detected by the detector (103B) and the phase value (&thgr;). Since the contact location of the contact portion (102A) can be detected by the contact location detector (70), the touch signal probe (10) can be used for a profiling measurement and continuous measurement of a workpiece.

    摘要翻译: 触摸信号探针(10)的接触位置检测机构(1)包括用于扫描地在平面(A)上移动触针(102)的旋转运动发生器(30),用于检测相位 指示扫描旋转运动的旋转位置的值(theta),以及用于基于由检测器(103B)检测到的检测信号值(V)检测接触部分(102A)的接触位置的接触位置检测器(70) 和相位值(theta)。 由于接触部分(102A)的接触位置可以由接触位置检测器(70)检测,所以触摸信号探针(10)可用于对工件进行测量和连续测量。

    Surface configuration measuring method
    5.
    发明授权
    Surface configuration measuring method 有权
    表面配置测量方法

    公开(公告)号:US06484571B1

    公开(公告)日:2002-11-26

    申请号:US09624908

    申请日:2000-07-24

    IPC分类号: G01B700

    CPC分类号: G01B5/012

    摘要: A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.

    摘要翻译: 提供了一种表面构造测量方法,其特征在于具有以下步骤:通过指令速度矢量移动触摸信号探针以接触要测量的工件的表面; 扫描要测量的工件的表面,触摸信号探头沿着待测量表面移动,同时控制相对于待测量表面的距离,使得由检测电路输出的检测信号的检测振幅值变为预定值 参考值,从而输出检测到的振幅值和相应的测量位置; 以及基于检测到的振幅值和估计的表面被扫描获得的测量位置来计算估计的表面位置,以使检测的振幅值保持恒定。

    Movement control mechanism of contact-type vibrating probe
    6.
    发明授权
    Movement control mechanism of contact-type vibrating probe 有权
    接触式振动探头的运动控制机构

    公开(公告)号:US06457366B1

    公开(公告)日:2002-10-01

    申请号:US09540051

    申请日:2000-03-31

    IPC分类号: G01N2900

    摘要: A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.

    摘要翻译: 提供接触式振动探针的移动控制机构,其中接触式振动探头可用作测量的探头,可以高精度地测量工件的连续测量和构造。 用于控制移动具有高检测精度的接触式振动探针(100)的支撑体(23)的移动的移动控制机构包括:用于使触针沿轴向振动的振动器,用于检测振动的检测器(5) 所述第二振动器用于使所述触针在与所述工件的端面大致平行的方向上振动;以及控制器,用于控制所述支撑体(23)的移动,使得所述触针的状态量变化 由检测器检测到的检测信号是恒定的。

    Method of suppressing geometric distortion of an image space
    8.
    发明授权
    Method of suppressing geometric distortion of an image space 有权
    抑制图像空间几何失真的方法

    公开(公告)号:US06671423B1

    公开(公告)日:2003-12-30

    申请号:US09695850

    申请日:2000-10-26

    IPC分类号: G06K932

    摘要: A reference space includes a plurality of reference graphics. An image space is obtained by imaging the reference space. Affine transformation series are determined from the reference and image spaces for transcribing graphic cores of imaged graphics on graphic cores of reference graphics. If an affine-transformed positional error falls outside a tolerance, the reference space is divided into sub-spaces. Affine transformations and space divisions are repeated for out-of-tolerance sub-spaces until their estimations of distortion finally fall inside the tolerance.

    摘要翻译: 参考空间包括多个参考图形。 通过对参考空间进行成像获得图像空间。 仿射变换系列由参考和图像空间确定,用于在参考图形的图形核心上转录成像图形的图形核心。 如果仿射变换位置误差超出公差,则将参考空间划分为子空间。 对于超公差子空间重复仿射变换和空间分割,直到其失真估计最终落入容差内。

    Synchronous data processing system having arithmetic and control units
controlled by single-phase clock pulses
    10.
    发明授权
    Synchronous data processing system having arithmetic and control units controlled by single-phase clock pulses 失效
    具有由单相时钟脉冲控制的算术和控制单元的同步数据处理系统

    公开(公告)号:US4027292A

    公开(公告)日:1977-05-31

    申请号:US536779

    申请日:1974-12-27

    CPC分类号: G06F1/04 G06F9/223

    摘要: A synchronous digital data processing system employing single-phase clock pulses comprises arithmetic and control units which are capable of completing an operation during one clock pulse period. The data processing system includes closed data paths wherein only one stage of a memory circuit capable of the same operation as a master/slave flip-flop is used as a data register in the arithmetic unit and as an address register in the control unit. In either case, during one cycle of a single-phase clock pulse, an input data is set in the memory circuit, and the output of the memory circuit is renewed in response to the input data. The output of the memory circuit is held until it is renewed in the following cycle.

    摘要翻译: 采用单相时钟脉冲的同步数字数据处理系统包括能够在一个时钟脉冲周期期间完成操作的算术和控制单元。 数据处理系统包括封闭数据路径,其中只有一个能够与主/从触发器相同操作的存储器电路的一个阶段用作算术单元中的数据寄存器和控制单元中的地址寄存器。 在任一情况下,在单相时钟脉冲的一个周期期间,在存储器电路中设置输入数据,并且响应于输入数据更新存储器电路的输出。 保持存储器电路的输出直到在下一周期中更新。