摘要:
A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).
摘要:
There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.
摘要:
A contact location detecting mechanism (1) of a touch signal probe (10) includes a rotary motion generator (30) for scanningly moving a stylus (102) on a plane (A), a phase value detector (50) for detecting a phase value (&thgr;) indicating a rotation position of the scanning rotary motion, and a contact location detector (70)for detecting a contact location of a contact portion (102A) based on a detection signal value (V) detected by the detector (103B) and the phase value (&thgr;). Since the contact location of the contact portion (102A) can be detected by the contact location detector (70), the touch signal probe (10) can be used for a profiling measurement and continuous measurement of a workpiece.
摘要:
A stylus structure (40) integrally incorporating a stylus (2), a vibrator (4), a detector (6), a first secondary magnetic circuit (12) and a second primary magnetic circuit (21), and a stylus support (30) integrally incorporating a first primary magnetic circuit (11) and a second secondary magnetic circuit (22) are mutually fittable, thereby achieving signal transmission by the respective magnetic circuits using no electrical contact.
摘要:
A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.
摘要:
A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.
摘要:
In a motion control apparatus for an induction motor, an inclination of acceleration/deceleration curve representing an increase/decrease per unit time in rotation speed of the induction motor is changed in accordance with the value of an angular frequency .omega.s corresponding to a slip speed of the induction motor.
摘要:
A reference space includes a plurality of reference graphics. An image space is obtained by imaging the reference space. Affine transformation series are determined from the reference and image spaces for transcribing graphic cores of imaged graphics on graphic cores of reference graphics. If an affine-transformed positional error falls outside a tolerance, the reference space is divided into sub-spaces. Affine transformations and space divisions are repeated for out-of-tolerance sub-spaces until their estimations of distortion finally fall inside the tolerance.
摘要:
A capacitive distance sensor adapted to measure a distance between an object and the sensor device, which is suitable for determining surface configuration of an object includes a objective electrode, moving device for the objective electrode and a detecting means of moving distance of the objective electrode. The moving device is controlled depending on the signal from the objective electrode to position it in a predetermined range of clearance. The distance between the object and the sensor device is calculated based on the signals from the detecting means and the objective electrode.
摘要:
A synchronous digital data processing system employing single-phase clock pulses comprises arithmetic and control units which are capable of completing an operation during one clock pulse period. The data processing system includes closed data paths wherein only one stage of a memory circuit capable of the same operation as a master/slave flip-flop is used as a data register in the arithmetic unit and as an address register in the control unit. In either case, during one cycle of a single-phase clock pulse, an input data is set in the memory circuit, and the output of the memory circuit is renewed in response to the input data. The output of the memory circuit is held until it is renewed in the following cycle.