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公开(公告)号：US06604295B2
公开(公告)日：2003-08-12
申请号：US09805309
申请日：2001-03-13
IPC分类号： G01B520
CPC分类号： G01Q10/02 , G01B7/12 , G01Q10/04 , G01Q10/045 , G01Q10/065 , G01Q20/04
摘要： A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).
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公开(公告)号：US6034773A
公开(公告)日：2000-03-07
申请号：US168967
申请日：1998-10-09
CPC分类号： G01B9/02052
摘要： There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.
摘要翻译： 提供了不受空气波动或温度变化影响的长度测量机。 在结构上，沿长度方向形成刻度，并且还提供内置的光波干涉仪。 内置光波干涉仪测量结构的长度，并将数据提供给电流控制器。 为了将结构的长度与标称值协调一致，电流控制器向结构上提供的电阻器提供电流以引起结构的热膨胀，或者结构被冷却。
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公开(公告)号：US06516529B2
公开(公告)日：2003-02-11
申请号：US09888317
申请日：2001-06-22
IPC分类号： G01B700
CPC分类号： G01B7/012
摘要： A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.
摘要翻译： 触针具有用于支撑和固定压电元件21至24的检测元件支撑部分1E和放置在检测元件支撑部分1E上的杆1D。 检测元件支撑部1E具有多个与杆1D的轴线正交的截面为规则的多边形的凸缘部1F。 位移检测元件以相对于杆1D的轴线以预定角度α倾斜的状态附接到凸缘部件1F的侧面。 如果通过接触球1A在杆1D上发生扭转方向Q的测量力或弯曲方向P，则测量的力沿着压电元件21至24的大致长度方向传递。
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公开(公告)号：US06327789B1
公开(公告)日：2001-12-11
申请号：US09366774
申请日：1999-08-04
IPC分类号： G01B500
摘要： In a touch signal probe (10) having a stylus holder (11), a vibrator (12) supported by the stylus holder (11) and has a contact portion (12A) to contact to a workpiece at a distal end thereof, a vibrating means (13A) for vibrating the vibrator (12) in an axial direction resonantly, and a detecting means (13B) for detecting the contact by a change in the vibration of the vibrator (12) caused by the contact to the workpiece is provided. The vibrator (12) is supported by the stylus holder (11) at two support points (A) and (B) positioned with a node of vibration of the vibrator (12) therebetween. Since the vibrating means (13A) and the detecting means (13B) are disposed spanning over the two support points, the node of vibration can be formed between the support points A and B and the size of the touch signal probe (10) can be easily reduced.
摘要翻译： 在具有触针保持器（11）的触摸信号探头（10）中，由触针保持器（11）支撑的振动器（12），并具有在其远端与工件接触的接触部分（12A），振动 提供用于振动振动器（12）在轴向上共振的装置（13A），以及用于通过与工件接触引起的振动器（12）的振动变化来检测接触的检测装置（13B）。 在两个支撑点（A）和（B）之间，振动器（12）由触针保持器（11）支撑，其中振动器（12）的振动节点位于它们之间。 由于振动装置（13A）和检测装置（13B）跨越两个支撑点设置，所以可以在支撑点A和B之间形成振动节点，并且触摸信号探针（10）的尺寸可以是 容易减少
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公开(公告)号：US5756886A
公开(公告)日：1998-05-26
申请号：US725214
申请日：1996-09-25
摘要： A touch probe which includes a fixed member, a movable member, a stylus, a bias means, and a reseat position system which permits the fixed member and the movable member to make contact with each other at pairs of contact points at positions which are spaced from one another. In the reseat position system, piezoelectric elements are provided which cause the fixed member and the movable member to move relatively in directions constrained by said pairs of contact points after a force applied to the movable member is removed. This realizes a touch probe which can secure high position reproducibility for a long period of time even if frictional forces act between the fixed member and the movable member.
摘要翻译： 一种触摸探针，其包括固定构件，可动构件，触针，偏置装置和重新安置位置系统，其允许固定构件和可动构件在成对的接触点处彼此接触，在间隔的位置处 从彼此。 在重新安置位置系统中，提供压电元件，其中在施加到可动构件上的力被去除之后，使得固定构件和可动构件相对于由所述接触点对约束的方向移动。 这实现了即使在固定构件和可动构件之间产生摩擦力的情况下也可以长时间确保高位置再现性的探针。
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公开(公告)号：US06314800B1
公开(公告)日：2001-11-13
申请号：US09461655
申请日：1999-12-14
申请人： Kunitoshi Nishimura
发明人： Kunitoshi Nishimura
IPC分类号： G01B528
摘要： A micro-geometry measuring device capable of reducing measuring force thereof for avoiding damage on micro-geometry of workpiece surface and measuring at a high-speed is provided. The micro-geometry measuring device has a stylus mechanism having a stylus mechanism provided to an arm and having a stylus body, a measuring force adjusting mechanism for adjusting a measuring force working between the stylus body and the workpiece, a displacement sensor for detecting a position of the arm, and a measuring force controller for controlling the measuring force adjusting mechanism. The stylus mechanism includes a vibrator for resonantly vibrating the stylus body, and a detector for detecting vibration status changing when the stylus body touches the workpiece. The change in vibration of the stylus body vibrated by the vibrator is directly detected by the detector and a signal therefrom is fed back to the measuring force controller to keep constant measuring force working between the stylus body and the workpiece.
摘要翻译： 提供了能够减小其测量力以避免对工件表面的微观几何造成的损伤并以高速度进行测量的微观几何测量装置。 微型几何测量装置具有触针机构，其具有设置到臂的触针机构，并具有触针体，用于调节在触针本体和工件之间工作的测量力的测量力调节机构，用于检测位置的位移传感器 以及用于控制测量力调节机构的测量力控制器。 触针机构包括用于使触针体共振地振动的振动器，以及用于检测当触针体接触工件时振动状态发生变化的检测器。 由振动器振动的触针体振动的变化由检测器直接检测，并且其信号被反馈给测量力控制器，以保持测针在工具之间的恒定的测量力。
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公开(公告)号：US06215225B1
公开(公告)日：2001-04-10
申请号：US09171194
申请日：1998-10-14
IPC分类号： H01L4108
CPC分类号： G01B7/012
摘要： A stylus has a piezoelectric element support part to support and fix piezoelectric elements. The piezoelectric element support part is a regular polygonal body and its cross section orthogonal to the axis of the stylus is made a regular polygon. The piezoelectric elements are mounted on each side surface of the regular polygonal body, respectively. Sums and difference signals outputted from the piezoelectric elements are produced and a touch detection signal is generated based on the produced signals.
摘要翻译： 触针具有用于支撑和固定压电元件的压电元件支撑部分。 压电元件支撑部是规则的多边形体，并且其与触笔的轴线正交的横截面被制成规则的多边形。 压电元件分别安装在正多边形体的每个侧表面上。 产生从压电元件输出的和值和差分信号，并且基于产生的信号产生触摸检测信号。
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