Invention Grant
- Patent Title: Method and apparatus for pretreating a substrate prior to electroplating
- Patent Title (中): 在电镀前预处理基板的方法和装置
-
Application No.: US10045782Application Date: 2002-01-12
-
Publication No.: US06624060B2Publication Date: 2003-09-23
- Inventor: Kuo-Feng Chen , Hsiu-Mei Yu , Charles Tseng , Ta-Yang Lin
- Applicant: Kuo-Feng Chen , Hsiu-Mei Yu , Charles Tseng , Ta-Yang Lin
- Main IPC: H01L2144
- IPC: H01L2144

Abstract:
A method including the step of providing a substrate having a contact pad, and an under bump metallurgy overlying the contact pad, and a photoresist layer overlying the under bump metallurgy, and wherein the photoresist layer has an opening defined therein down to the under bump metallurgy and aligned with the contact pad. Pretreating the substrate with the first wetting solution prior to plating a first seed layer over the under bump metallurgy. Thereafter, plating a first seed layer is plated onto the under bump metallurgy.
Public/Granted literature
- US20030134498A1 METHOD AND APPARATUS FOR PRETREATING A SUBSTRATE PRIOR TO ELECTROPLATING Public/Granted day:2003-07-17
Information query