Invention Grant
- Patent Title: Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
- Patent Title (中): 使含卤素气体无害化的除害剂及其使用方法
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Application No.: US10030248Application Date: 2002-01-09
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Publication No.: US06649082B2Publication Date: 2003-11-18
- Inventor: Yuji Hayasaka , Hitoshi Atobe , Yoshio Furuse
- Applicant: Yuji Hayasaka , Hitoshi Atobe , Yoshio Furuse
- Priority: JP2000-156236 20000526
- Main IPC: H01L2100
- IPC: H01L2100

Abstract:
The present invention intends to provide an agent and a method for removing harmful gas, which exhibits high harm-removing ability per unit volume for harmful halogen-containing gas contained in the exhaust gas from the etching or cleaning step in the manufacturing process of a semiconductor device, and which is inexpensive. The invention is characterized by that halogen-containing gas is removed using a harm-removing agent comprising a specific iron oxide, an alkaline earth metal compound and activated carbon in the specific amount. In the case where the exhaust gas contains halogen gas such as chlorine or a gas such as sulfur dioxide, the gas is rendered harmless by using in combination a harm-removing agent comprising activated carbon or zeolite.
Public/Granted literature
- US20030082918A1 Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof Public/Granted day:2003-05-01
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