Invention Grant
US06649082B2 Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof 失效
使含卤素气体无害化的除害剂及其使用方法

  • Patent Title: Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
  • Patent Title (中): 使含卤素气体无害化的除害剂及其使用方法
  • Application No.: US10030248
    Application Date: 2002-01-09
  • Publication No.: US06649082B2
    Publication Date: 2003-11-18
  • Inventor: Yuji HayasakaHitoshi AtobeYoshio Furuse
  • Applicant: Yuji HayasakaHitoshi AtobeYoshio Furuse
  • Priority: JP2000-156236 20000526
  • Main IPC: H01L2100
  • IPC: H01L2100
Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
Abstract:
The present invention intends to provide an agent and a method for removing harmful gas, which exhibits high harm-removing ability per unit volume for harmful halogen-containing gas contained in the exhaust gas from the etching or cleaning step in the manufacturing process of a semiconductor device, and which is inexpensive. The invention is characterized by that halogen-containing gas is removed using a harm-removing agent comprising a specific iron oxide, an alkaline earth metal compound and activated carbon in the specific amount. In the case where the exhaust gas contains halogen gas such as chlorine or a gas such as sulfur dioxide, the gas is rendered harmless by using in combination a harm-removing agent comprising activated carbon or zeolite.
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