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    Catalyst for decomposing nitrous oxide, process for producing the same and method for decomposing nitrous oxide
    1.
    发明授权
    Catalyst for decomposing nitrous oxide, process for producing the same and method for decomposing nitrous oxide 有权
    用于分解一氧化二氮的催化剂，其制备方法和分解一氧化二氮的方法

    公开(公告)号：US06846471B2

    公开(公告)日：2005-01-25

    申请号：US09947540

    申请日：2001-09-07

    Applicant: Masatoshi Hotta ,  Masakazu Oka ,  Yoshio Furuse ,  Hitoshi Atobe ,  Shigehiro Chaen

    Inventor： Masatoshi Hotta ,  Masakazu Oka ,  Yoshio Furuse ,  Hitoshi Atobe ,  Shigehiro Chaen

    IPC: A61M16/01 ,  B01D53/86 ,  B01D53/94 ,  B01J23/00 ,  B01J23/46 ,  B01J23/58 ,  B01J23/60 ,  B01J23/62 ,  B01J23/63 ,  B01J23/656 ,  B01J23/89 ,  B01J8/00 ,  B01J23/32 ,  B01J23/40 ,  B01J23/42

    CPC classification number: B01J23/005 ,  B01D53/8628 ,  B01D2257/402 ,  B01J23/464 ,  B01J23/58 ,  B01J23/60 ,  B01J23/89 ,  Y02C20/10

    Abstract: The invention relates to a catalyst for decomposing nitrous oxide, which is [1] a catalyst comprising a support having supported thereon aluminum, magnesium and rhodium, [2] a catalyst comprising an alumina support having supported thereon magnesium and rhodium, [3] a catalyst comprising a support having supported thereon rhodium, the support comprising a spinel crystalline composite oxide formed by magnesium and at least a part of aluminum, [4] a catalyst comprising a support having supported thereon aluminum, rhodium and at least one metal selected from zinc, iron, manganese and nickel, [5] a catalyst comprising an alumina support having supported thereon rhodium and at least one metal selected from zinc, iron, manganese and nickel, or [6] a catalyst comprising a support having supported thereon rhodium, the support comprising a spinel crystalline composite oxide formed by at least a part of aluminum and the at least one metal selected from zinc, iron, manganese and nickel. The catalyst is not easily deteriorated in the activity due to moisture, favored with low-temperature decomposition activity and capable of reducing the amount of NOx generated to the allowable concentration or less. The invention also relates to a process for producing the catalyst and to a method for decomposing nitrous oxide.

    Abstract translation: 本发明涉及一种用于分解一氧化二氮的催化剂，其是[1]一种催化剂，其包含负载有铝，镁和铑的载体，[2]一种催化剂，其包含负载有镁和铑的氧化铝载体，[3] a 催化剂包括其上负载有铑的载体，所述载体包含由镁和至少一部分铝形成的尖晶石结晶复合氧化物，[4]催化剂，其包含负载有铝，铑和至少一种选自锌的金属的催化剂 ，铁，锰和镍，[5]催化剂，其包含负载有铑的氧化铝载体和选自锌，铁，锰和镍的至少一种金属的催化剂，或[6]一种催化剂，其包含其上负载有铑的载体， 载体，其包含由至少一部分铝和选自锌，铁，锰和镍中的至少一种金属形成的尖晶石结晶复合氧化物。 催化剂不易由于水分而导致的活性降低，有利于低温分解活性，并且能够将生成的NOx的量减少至允许浓度或更低。 本发明还涉及一种生产该催化剂的方法和一种分解一氧化二氮的方法。

    Reactive agent and process for decomposing nitrogen fluoride
    2.
    发明授权
    Reactive agent and process for decomposing nitrogen fluoride 失效
    用于分解氟化氮的反应剂和方法

    公开(公告)号：US6146606A

    公开(公告)日：2000-11-14

    申请号：US473134

    申请日：1999-12-28

    Applicant: Hitoshi Atobe ,  Toraichi Kaneko

    Inventor： Hitoshi Atobe ,  Toraichi Kaneko

    IPC: B01D53/68 ,  B01J8/02 ,  B01J8/00

    CPC classification number: B01D53/685 ,  B01J8/0242 ,  B01D2257/204 ,  B01D2257/40 ,  B01J2208/00044 ,  B01J2208/00274 ,  B01J2208/00398 ,  B01J2208/00407 ,  B01J2208/00415 ,  Y02C20/30

    Abstract: A process for decomposing nitrogen fluoride, comprising contacting gaseous nitrogen fluoride with a solid reactive agent for decomposition at 200.degree. C. or more to fix the fluorine component in the nitrogen fluoride to the reactive agent and at the same time control generation of nitrogen oxides, fluorocarbon and carbon monoxide as by-products, the reactive agent containing elemental carbon; aluminum compound, iron compound, manganese compound and/or alkaline earth metal; alkali metal compound; and nickel compound, tin compound and/or copper compound.

    Abstract translation: 一种分解氮氟化物的方法，包括使气态氟化氮与固体反应剂在200℃或更高温度下分解，将氮氟化物中的氟组分固定在反应剂上，同时控制氮氧化物的产生， 碳氟化合物和一氧化碳作为副产物，反应剂含有元素碳; 铝化合物，铁化合物，锰化合物和/或碱土金属; 碱金属化合物; 和镍化合物，锡化合物和/或铜化合物。

    Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
    6.
    发明授权
    Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof 失效
    使含卤素气体无害化的除害剂及其使用方法

    公开(公告)号：US06649082B2

    公开(公告)日：2003-11-18

    申请号：US10030248

    申请日：2002-01-09

    Applicant: Yuji Hayasaka ,  Hitoshi Atobe ,  Yoshio Furuse

    Inventor： Yuji Hayasaka ,  Hitoshi Atobe ,  Yoshio Furuse

    IPC: H01L2100

    CPC classification number: B01D53/02 ,  B01D53/685 ,  B01D53/8659 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2255/20738 ,  B01D2256/26 ,  B01D2258/0216 ,  B01J21/18 ,  B01J23/78

    Abstract: The present invention intends to provide an agent and a method for removing harmful gas, which exhibits high harm-removing ability per unit volume for harmful halogen-containing gas contained in the exhaust gas from the etching or cleaning step in the manufacturing process of a semiconductor device, and which is inexpensive. The invention is characterized by that halogen-containing gas is removed using a harm-removing agent comprising a specific iron oxide, an alkaline earth metal compound and activated carbon in the specific amount. In the case where the exhaust gas contains halogen gas such as chlorine or a gas such as sulfur dioxide, the gas is rendered harmless by using in combination a harm-removing agent comprising activated carbon or zeolite.

    Abstract translation: 本发明旨在提供一种除去有害气体的试剂和方法，其在半导体制造过程中的蚀刻或清洗步骤中对废气中含有的含有卤素的气体每单位体积具有高的除害能力 装置，其价格便宜。本发明的特征在于，使用包含特定氧化铁，碱土金属化合物和特定量的活性炭的除害剂除去含卤素气体。 在废气中含有卤素气体如氯气或二氧化硫等气体的情况下，通过组合使用包含活性炭或沸石的除害剂，使气体变得无害化。

    High-purity fluorine gas, production and use thereof, and method for analyzing trace impurities in high-purity fluorine gas
    10.
    发明授权
    High-purity fluorine gas, production and use thereof, and method for analyzing trace impurities in high-purity fluorine gas 失效
    高纯度氟气的生产和使用以及高纯度氟气中痕量杂质的分析方法

    公开(公告)号：US06955801B2

    公开(公告)日：2005-10-18

    申请号：US10362876

    申请日：2002-06-27

    Applicant: Junichi Torisu ,  Hitoshi Atobe ,  Yasuyuki Hoshino

    Inventor： Junichi Torisu ,  Hitoshi Atobe ,  Yasuyuki Hoshino

    IPC: C01B7/20 ,  G01N21/03 ,  G01N21/09 ,  G01N21/35 ,  G01N30/14 ,  H01S3/036 ,  H01S3/225 ,  G01N30/88

    CPC classification number: G01N21/3504 ,  C01B7/20 ,  G01N21/0303 ,  G01N21/09 ,  G01N2030/143 ,  H01S3/036 ,  H01S3/225 ,  Y10T436/19

    Abstract: A step (1) of heating a fluoronickel compound to release a fluorine gas, a step (2) of allowing a fluorine gas to be occluded into a fluorinated compound, and a step (3) of heating the fluoronickel compound and reducing an inner pressure are conducted in a container, respectively, at least once, and thereafter a high-purity fluorine gas is obtained in the step (1). Also, a step (5) of heating a fluoronickel compound and reducing an inner pressure and a step (6) of allowing a fluorine gas reduced in a hydrogen fluoride content to be occluded into the fluoronickel compound are conducted in a container having a fluorinated layer formed on its surface, respectively, at least once, the step (5) is further conducted, and thereafter a fluorine gas containing impurity gases is contacted with the fluoronickel compound to fix and remove the fluorine gas, and the impurities are analyzed by gas chromatography.

    Abstract translation: 将氟化合物加热以释放氟气的步骤（1），允许氟气封闭到氟化合物中的步骤（2）和加热氟化合物并降低内部压力的步骤（3） 分别在容器中进行至少一次，然后在步骤（1）中获得高纯度氟气。 此外，将氟化合物的加热步骤（5）和内部压力降低，以及将氟化氢含量降低的氟气阻挡在氟化合物中的步骤（6）在具有氟化层的容器中进行 在其表面上分别至少形成一次，进一步进行步骤（5），然后将含有杂质气体的氟气与氟化合物化合物接触以固定和除去氟气，并通过气相色谱分析杂质 。

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