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    Catalyst for decomposing nitrous oxide, process for producing the same and method for decomposing nitrous oxide
    2.
    发明授权
    Catalyst for decomposing nitrous oxide, process for producing the same and method for decomposing nitrous oxide 有权
    用于分解一氧化二氮的催化剂，其制备方法和分解一氧化二氮的方法

    公开(公告)号：US06846471B2

    公开(公告)日：2005-01-25

    申请号：US09947540

    申请日：2001-09-07

    申请人： Masatoshi Hotta ,  Masakazu Oka ,  Yoshio Furuse ,  Hitoshi Atobe ,  Shigehiro Chaen

    发明人： Masatoshi Hotta ,  Masakazu Oka ,  Yoshio Furuse ,  Hitoshi Atobe ,  Shigehiro Chaen

    IPC分类号： A61M16/01 ,  B01D53/86 ,  B01D53/94 ,  B01J23/00 ,  B01J23/46 ,  B01J23/58 ,  B01J23/60 ,  B01J23/62 ,  B01J23/63 ,  B01J23/656 ,  B01J23/89 ,  B01J8/00 ,  B01J23/32 ,  B01J23/40 ,  B01J23/42

    CPC分类号： B01J23/005 ,  B01D53/8628 ,  B01D2257/402 ,  B01J23/464 ,  B01J23/58 ,  B01J23/60 ,  B01J23/89 ,  Y02C20/10

    摘要： The invention relates to a catalyst for decomposing nitrous oxide, which is [1] a catalyst comprising a support having supported thereon aluminum, magnesium and rhodium, [2] a catalyst comprising an alumina support having supported thereon magnesium and rhodium, [3] a catalyst comprising a support having supported thereon rhodium, the support comprising a spinel crystalline composite oxide formed by magnesium and at least a part of aluminum, [4] a catalyst comprising a support having supported thereon aluminum, rhodium and at least one metal selected from zinc, iron, manganese and nickel, [5] a catalyst comprising an alumina support having supported thereon rhodium and at least one metal selected from zinc, iron, manganese and nickel, or [6] a catalyst comprising a support having supported thereon rhodium, the support comprising a spinel crystalline composite oxide formed by at least a part of aluminum and the at least one metal selected from zinc, iron, manganese and nickel. The catalyst is not easily deteriorated in the activity due to moisture, favored with low-temperature decomposition activity and capable of reducing the amount of NOx generated to the allowable concentration or less. The invention also relates to a process for producing the catalyst and to a method for decomposing nitrous oxide.

    摘要翻译： 本发明涉及一种用于分解一氧化二氮的催化剂，其是[1]一种催化剂，其包含负载有铝，镁和铑的载体，[2]一种催化剂，其包含负载有镁和铑的氧化铝载体，[3] a 催化剂包括其上负载有铑的载体，所述载体包含由镁和至少一部分铝形成的尖晶石结晶复合氧化物，[4]催化剂，其包含负载有铝，铑和至少一种选自锌的金属的催化剂 ，铁，锰和镍，[5]催化剂，其包含负载有铑的氧化铝载体和选自锌，铁，锰和镍的至少一种金属的催化剂，或[6]一种催化剂，其包含其上负载有铑的载体， 载体，其包含由至少一部分铝和选自锌，铁，锰和镍中的至少一种金属形成的尖晶石结晶复合氧化物。 催化剂不易由于水分而导致的活性降低，有利于低温分解活性，并且能够将生成的NOx的量减少至允许浓度或更低。 本发明还涉及一种生产该催化剂的方法和一种分解一氧化二氮的方法。

    Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
    3.
    发明授权
    Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof 失效
    使含卤素气体无害化的除害剂及其使用方法

    公开(公告)号：US06649082B2

    公开(公告)日：2003-11-18

    申请号：US10030248

    申请日：2002-01-09

    申请人： Yuji Hayasaka ,  Hitoshi Atobe ,  Yoshio Furuse

    发明人： Yuji Hayasaka ,  Hitoshi Atobe ,  Yoshio Furuse

    IPC分类号： H01L2100

    CPC分类号： B01D53/02 ,  B01D53/685 ,  B01D53/8659 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2255/20738 ,  B01D2256/26 ,  B01D2258/0216 ,  B01J21/18 ,  B01J23/78

    摘要： The present invention intends to provide an agent and a method for removing harmful gas, which exhibits high harm-removing ability per unit volume for harmful halogen-containing gas contained in the exhaust gas from the etching or cleaning step in the manufacturing process of a semiconductor device, and which is inexpensive. The invention is characterized by that halogen-containing gas is removed using a harm-removing agent comprising a specific iron oxide, an alkaline earth metal compound and activated carbon in the specific amount. In the case where the exhaust gas contains halogen gas such as chlorine or a gas such as sulfur dioxide, the gas is rendered harmless by using in combination a harm-removing agent comprising activated carbon or zeolite.

    摘要翻译： 本发明旨在提供一种除去有害气体的试剂和方法，其在半导体制造过程中的蚀刻或清洗步骤中对废气中含有的含有卤素的气体每单位体积具有高的除害能力 装置，其价格便宜。本发明的特征在于，使用包含特定氧化铁，碱土金属化合物和特定量的活性炭的除害剂除去含卤素气体。 在废气中含有卤素气体如氯气或二氧化硫等气体的情况下，通过组合使用包含活性炭或沸石的除害剂，使气体变得无害化。