发明授权
- 专利标题: Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
- 专利标题(中): 喷墨记录头,其制造方法和喷墨记录装置
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申请号: US09756292申请日: 2001-01-09
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公开(公告)号: US06712456B2公开(公告)日: 2004-03-30
- 发明人: Akira Matsuzawa , Masato Shimada , Tetsushi Takahashi
- 申请人: Akira Matsuzawa , Masato Shimada , Tetsushi Takahashi
- 优先权: JP2000-007651 20000117; JP2000-020245 20000128; JP2000-229343 20000728; JP2000-332557 20001031
- 主分类号: B41J2045
- IPC分类号: B41J2045
摘要:
Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
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