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    Method of manufacturing liquid jet head
    1.
    发明授权
    Method of manufacturing liquid jet head 失效
    液体喷头的制造方法

    公开(公告)号：US07381341B2

    公开(公告)日：2008-06-03

    申请号：US11037137

    申请日：2005-01-19

    申请人： Masato Shimada ,  Tetsushi Takahashi

    发明人： Masato Shimada ,  Tetsushi Takahashi

    IPC分类号： G01D15/00 ,  G11B5/127

    CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  Y10T29/49401

    摘要： Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a reinforcing substrate for reinforcing the rigidity of the passage-forming substrate, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the reinforcing substrate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers. Thus, handling of the passage-forming substrate becomes easy, and the pressure generating chambers can be formed with high precision.

    摘要翻译： 公开了一种制造液体喷射头的方法，其使得能够容易地处理通道形成基板，从而实现良好的压力发生室的形成和提高制造效率。 该方法包括以下步骤：在通道形成基板的一个表面上形成振动板和压电元件; 将用于增强通道形成基板的刚性的增强基板热粘附到通道形成基板上; 处理通道形成衬底以具有预定厚度; 在比通过用通路形成基板和增强基板粘接的温度低的温度下在通路形成基板的其他表面上沉积绝缘膜，并且将绝缘膜图案化成预定的形状; 并使用图案化的绝缘膜作为掩模蚀刻通道形成基板以形成压力发生室。 因此，通道形成基板的处理变得容易，可以高精度地形成压力发生室。

    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS
    2.
    发明申请
    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 有权
    液体喷射和液体喷射装置

    公开(公告)号：US20080062225A1

    公开(公告)日：2008-03-13

    申请号：US11854359

    申请日：2007-09-12

    申请人： Akira MATSUZAWA ,  Mutsuhiko OTA ,  Tetsushi TAKAHASHI ,  Yasuyuki MATSUMOTO

    发明人： Akira MATSUZAWA ,  Mutsuhiko OTA ,  Tetsushi TAKAHASHI ,  Yasuyuki MATSUMOTO

    IPC分类号： B41J2/05

    CPC分类号： B41J2/14233 ,  B41J2/045 ,  B41J2202/11

    摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.

    摘要翻译： 一种液体喷射头，其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道，至少包括通过分隔壁划分的压力产生室，每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室，并且在压力产生室中产生压力变化，从而引起液滴喷射。

    Method of manufacturing a liquid jet head
    3.
    发明授权
    Method of manufacturing a liquid jet head 失效
    制造液体喷头的方法

    公开(公告)号：US07318277B2

    公开(公告)日：2008-01-15

    申请号：US11133469

    申请日：2005-05-20

    申请人： Tatsuro Torimoto ,  Akira Matsuzawa ,  Mutsuhiko Ota ,  Tetsushi Takahashi

    发明人： Tatsuro Torimoto ,  Akira Matsuzawa ,  Mutsuhiko Ota ,  Tetsushi Takahashi

    IPC分类号： B21D53/76 ,  G01D15/00

    CPC分类号： B41J2/1623 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49151 ,  Y10T29/49401

    摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.

    摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。

    Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers
    5.
    再颁专利
    Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers 有权

    公开(公告)号：USRE39474E1

    公开(公告)日：2007-01-23

    申请号：US10319491

    申请日：2002-12-16

    申请人： Tsutomu Hashizume ,  Tetsushi Takahashi ,  Akira Matsuzawa

    发明人： Tsutomu Hashizume ,  Tetsushi Takahashi ,  Akira Matsuzawa

    IPC分类号： B41J2/045 ,  H04R17/00

    摘要： An A method of manufacturing an ink-jet recording head comprising: which includes an elastic sheet providing facing pressure generating chambers; , nozzle orifices, each communicating with the pressure generating chambers; , and piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, the method including forming a piezoelectric layer formed on the lower electrode, and forming an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the area where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. The upper electrodes of the piezoelectric vibrators are positioned independently of each other; and an electrical insulator layer having windows, wherein the electrical insulator layer covers is formed to cover the upper electrodes; , and a conductor pattern connecting with is connected to the upper electrodes via the windows of the electrical insulator layer.

    Ink-jet recording head inkjet recording apparatus
    6.
    发明授权
    Ink-jet recording head inkjet recording apparatus 有权
    喷墨记录头和喷墨记录装置

    公开(公告)号：US06764167B2

    公开(公告)日：2004-07-20

    申请号：US10446937

    申请日：2003-05-29

    申请人： Masato Shimada ,  Yoshinao Miyata ,  Hiroyuki Kamei ,  Tetsushi Takahashi

    发明人： Masato Shimada ,  Yoshinao Miyata ,  Hiroyuki Kamei ,  Tetsushi Takahashi

    IPC分类号： B41J2045

    CPC分类号： B41J2/1629 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus. In an ink-jet recording head, comprising: a pressure generating chamber (12) communicating with a nozzle orifice; and a piezoelectric element (300) having a lower electrode (60), a piezoelectric layer (70) and an upper electrode (80), the piezoelectric element (300) being provided in a region corresponding to the pressure generating chamber (12) with a vibration plate interposed therebetween, the piezoelectric element (300) includes a piezoelectric active portion (320) as a substantial drive portion and a piezoelectric non-active portion (330) having the piezoelectric layer (70) continuous from the piezoelectric active portion (320) but not being substantially driven, and a stress suppression layer (100) for suppressing stress due to drive of the piezoelectric element (300) is provided, straddling a boundary between the piezoelectric active portion (320) and the piezoelectric non-active portion (330).

    摘要翻译： 公开了一种喷墨记录头，其中喷嘴可以以高密度排列并且其制造成本降低，并且喷墨记录装置。 在喷墨记录头中，包括：与喷嘴孔连通的压力产生室（12）; 以及具有下电极（60），压电层（70）和上电极（80）的压电元件（300），所述压电元件（300）设置在与所述压力发生室（12）对应的区域中，所述压电元件 压电元件（300）包括作为实质驱动部分的压电有源部分（320）和压电非活性部分（330），其压电层（70）与压电有源部分（320）连续 ）而不是被大致驱动，并且设置用于抑制由于压电元件（300）的驱动引起的应力的应力抑制层（100），跨越压电有源部分（320）和压电非有效部分 330）。

    Ink jet printing head for improving resolution and decreasing crosstalk
    7.
    发明授权
    Ink jet printing head for improving resolution and decreasing crosstalk 失效
    喷墨打印头，用于提高分辨率和降低串扰

    公开(公告)号：US06126279A

    公开(公告)日：2000-10-03

    申请号：US107276

    申请日：1998-06-30

    申请人： Masato Shimada ,  Tetsushi Takahashi ,  Tsutomu Nishiwaki ,  Tsutomu Hashizume

    发明人： Masato Shimada ,  Tetsushi Takahashi ,  Tsutomu Nishiwaki ,  Tsutomu Hashizume

    IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

    CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14387

    摘要： An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.

    摘要翻译： 喷墨打印头包括：加压室基板，其具有彼此相对的第一和第二边; 多个加压室，形成在加压室基板的第一侧上; 形成在加压室基板的第二侧上的通道分别与加压室相对; 用于对各加压室内的油墨进行加压的振动板膜; 以及压电薄膜元件，每个具有上电极和下电极以及夹在上电极和下电极之间的压电薄膜，压电薄膜形成在通道中，其中至少上电极形成为具有比 加压室的那个。 以及一种用于制造喷墨头的方法。

    LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS
    10.
    发明申请
    LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS 有权
    液体喷射头和液体喷射装置

    公开(公告)号：US20080030552A1

    公开(公告)日：2008-02-07

    申请号：US11831757

    申请日：2007-07-31

    申请人： Yasuyuki MATSUMOTO ,  Tetsushi TAKAHASHI ,  Akira MATSUZAWA

    发明人： Yasuyuki MATSUMOTO ,  Tetsushi TAKAHASHI ,  Akira MATSUZAWA

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： A liquid ejection head including: a flow-channel forming substrate having a pressure generating chamber which communicates with a liquid supply channel which communicates with one end of the pressure generating chamber in terms of a first direction so as to have a first length for supplying liquid to the pressure generating chamber; and a pressure generating unit that causes the change in pressure in the pressure generating chamber, wherein the liquid supply channel is formed by narrowing the width of the pressure generating chamber in a second direction substantially perpendicular to the first direction so as to have a second length shorter than the first length, a stepped surface is formed between the side surface of the pressure generating chamber in the second direction and the side surface of the liquid supply channel in the second direction, and wherein a bridge is provided at a corner defined by the stepped surface, the side surface of the pressure generating chamber in the second direction on the stepped surface side, and one of the surfaces of the pressure generating chamber in a third direction which is orthogonal to the first direction and the second direction of the flow-channel forming substrate for bridging the corner.

    摘要翻译： 一种液体喷射头，包括：流路形成基板，具有压力产生室，该压力产生室与液体供应通道连通，该液体供应通道在第一方向上与压力产生室的一端连通，以便具有用于供应液体的第一长度 到压力发生室; 以及压力发生单元，其导致压力发生室中的压力变化，其中通过使压力发生室的宽度在基本上垂直于第一方向的第二方向上变窄而形成液体供给通道，以具有第二长度 比第一长度短，在第二方向的压力发生室的侧面与第二方向的液体供给路径的侧面之间形成台阶面，并且在由 压力发生室的侧表面在阶梯表面侧的第二方向上，并且压力发生室的表面中的一个表面在与第一方向和第二方向垂直的第三方向上， 用于桥接拐角的通道形成衬底。