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1.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US07135121B2
公开(公告)日：2006-11-14
申请号：US10754712
申请日：2004-01-12
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.
摘要翻译： 一种用于提高压电元件和压力发生室之间的相对位置精度的喷墨记录头的制造方法，以改善喷墨特性和稳定性。 该制造方法包括以下步骤：在通道形成基板上形成通道形成层，并且对通道形成层的空间部分的区域赋予蚀刻选择性; 在通道形成层上形成振动板和压电元件; 在所述通道形成基板上进行各向异性蚀刻，至少形成到所述空间部分的区域，蚀刻所述通道形成层以形成所述空间部分，以及形成与所述空间部分相对的压力产生室; 并将喷嘴板接合到通道形成基板。
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2.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US06712456B2
公开(公告)日：2004-03-30
申请号：US09756292
申请日：2001-01-09
IPC分类号： B41J2045
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
摘要翻译： 公开了一种提高压电元件和压力发生室之间的相对位置精度的喷墨记录头，以改善喷墨特性和稳定性，能够以高密度排列压力发生室，并减少压力产生室之间的串扰。 此外，公开了其制造方法以及其中内置喷墨记录头的喷墨记录装置。喷墨记录头包括：具有形成在其中的压力发生室11的通道形成基板10， 其与喷嘴孔连通; 以及压电元件300，其通过构成压力发生室11的一部分的振动板，在与压力发生室11对应的区域中由薄膜和平版印刷法形成。喷墨记录头的特征在于， 与压力发生室11连通并且具有由振动板构成的至少一个表面的空间部分41设置在通道形成基板10和振动板之间的区域中，该区域与压力产生室11相对，并且在 靠近空间部41的压力发生室11的最小宽度被设定为等于空间部41的宽度以下，从而提高了压力发生室11与压电元件300之间的相对位置精度。
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公开(公告)号：US07318277B2
公开(公告)日：2008-01-15
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
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公开(公告)号：USRE39474E1
公开(公告)日：2007-01-23
申请号：US10319491
申请日：2002-12-16
摘要： An A method of manufacturing an ink-jet recording head comprising: which includes an elastic sheet providing facing pressure generating chambers; , nozzle orifices, each communicating with the pressure generating chambers; , and piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, the method including forming a piezoelectric layer formed on the lower electrode, and forming an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the area where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. The upper electrodes of the piezoelectric vibrators are positioned independently of each other; and an electrical insulator layer having windows, wherein the electrical insulator layer covers is formed to cover the upper electrodes; , and a conductor pattern connecting with is connected to the upper electrodes via the windows of the electrical insulator layer.
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公开(公告)号：US08061813B2
公开(公告)日：2011-11-22
申请号：US11854359
申请日：2007-09-12
IPC分类号： B41J2/05
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
摘要翻译： 一种液体喷射头，其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道，至少包括通过分隔壁划分的压力产生室，每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室，并且在压力产生室中产生压力变化，从而引起液滴喷射。
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公开(公告)号：US07789495B2
公开(公告)日：2010-09-07
申请号：US11831757
申请日：2007-07-31
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： A liquid ejection head including: a flow-channel forming substrate having a pressure generating chamber which communicates with a liquid supply channel which communicates with one end of the pressure generating chamber in terms of a first direction so as to have a first length for supplying liquid to the pressure generating chamber; and a pressure generating unit that causes the change in pressure in the pressure generating chamber, wherein the liquid supply channel is formed by narrowing the width of the pressure generating chamber in a second direction substantially perpendicular to the first direction so as to have a second length shorter than the first length, a stepped surface is formed between the side surface of the pressure generating chamber in the second direction and the side surface of the liquid supply channel in the second direction, and wherein a bridge is provided at a corner defined by the stepped surface, the side surface of the pressure generating chamber in the second direction on the stepped surface side, and one of the surfaces of the pressure generating chamber in a third direction which is orthogonal to the first direction and the second direction of the flow-channel forming substrate for bridging the corner.
摘要翻译： 一种液体喷射头，包括：流路形成基板，具有压力产生室，该压力产生室与液体供应通道连通，该液体供应通道在第一方向上与压力产生室的一端连通，以便具有用于供应液体的第一长度 到压力发生室; 以及压力发生单元，其导致压力发生室中的压力变化，其中通过使压力发生室的宽度在基本上垂直于第一方向的第二方向上变窄而形成液体供给通道，以具有第二长度 比第一长度短，在第二方向的压力发生室的侧面与第二方向的液体供给路径的侧面之间形成台阶面，并且在由 压力发生室的侧表面在阶梯表面侧的第二方向上，并且压力发生室的表面中的一个表面在与第一方向和第二方向垂直的第三方向上， 用于桥接拐角的通道形成衬底。
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公开(公告)号：US20050262691A1
公开(公告)日：2005-12-01
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
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8.发明授权Ink jet recording head having reduced stress concentration near the boundaries of pressure generating chambers 失效喷墨记录头在压力发生室的边界附近具有降低的应力集中
公开(公告)号：US6089701A
公开(公告)日：2000-07-18
申请号：US835748
申请日：1997-04-10
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14387 , B41J2002/14491
摘要： An ink-jet recording head comprising: an elastic sheet providing pressure generating chambers; nozzle orifices, each communicating with the pressure generating chamber; piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the upper electrodes of the piezoelectric vibrators are positioned independently of each other; an electrical insulator layer having windows, wherein the electrical insulator layer covers the upper electrodes; and a conductor pattern connecting with the upper electrodes via the windows of the electrical insulator layer.
摘要翻译： 一种喷墨记录头，包括：提供压力产生室的弹性片; 喷嘴孔，每个喷嘴孔与压力发生室连通; 形成在弹性片上的压电振动器，每个压电振动器具有形成在弹性片上的下电极，形成在下电极上的压电层和形成在压电层上的上电极，使得上电极面对相应的 压力发生室，其中压电振动器的上电极彼此独立地定位; 具有窗口的电绝缘体层，其中所述电绝缘体层覆盖所述上电极; 以及通过电绝缘体层的窗口与上电极连接的导体图案。
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公开(公告)号：US08342656B2
公开(公告)日：2013-01-01
申请号：US13299693
申请日：2011-11-18
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
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10.发明授权Ink jet recording head, method for manufacturing the same, and ink jet recorder 失效喷墨记录头，其制造方法和喷墨记录器公开(公告)号：US06502930B1
公开(公告)日：2003-01-07
申请号：US09806699
申请日：2001-04-04
IPC分类号： B41J214
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2002/14241 , B41J2002/1437 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus. In an ink-jet recording head including a passage-forming substrate (10) having a silicon layer consisting of single crystal silicon, in which a pressure generating chamber (15) communicating with a nozzle orifice is defined; and a piezoelectric element (300) for generating a pressure change in the pressure generating chamber, the piezoelectric element being provided on a region facing the pressure generating chamber (15) via a vibration plate constituting a part of the pressure generating chamber (15), the pressure generating chamber (15) is formed so as to open to one surface of the passage-forming substrate (10) and not to penetrate therethrough, at least a bottom surface of inner surfaces of the pressure generating chamber (15), which is facing to the one surface, is constituted of an etching stop surface as a surface in which anisotropic etching stops, and the piezoelectric element (300) is provided on the one surface side of the passage-forming substrate (10) by a film formed by film deposition technology and a lithography method.
摘要翻译： 公开了一种喷墨记录头，其中室壁的刚度提高，压力发生室可以高密度地布置，并且压力发生室之间的串扰减少，并且其制造方法和 一种喷墨记录装置。 在包括具有由单晶硅组成的硅层的通道形成基板（10）的喷墨记录头中，其中限定了与喷嘴孔连通的压力发生室（15） 以及用于在所述压力发生室中产生压力变化的压电元件（300），所述压电元件经由构成所述压力发生室（15）的一部分的振动板设置在面对所述压力发生室（15）的区域上， 压力发生室15形成为在通道形成基板（10）的一个表面上开口，并且至少在压力发生室（15）的内表面的底表面上不穿透压力发生室 由作为各向异性蚀刻停止的表面的蚀刻停止面构成压电元件（300），在通路形成用基板（10）的一个表面侧，通过由 薄膜沉积技术和光刻方法。
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