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1.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US07135121B2
公开(公告)日：2006-11-14
申请号：US10754712
申请日：2004-01-12
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.
摘要翻译： 一种用于提高压电元件和压力发生室之间的相对位置精度的喷墨记录头的制造方法，以改善喷墨特性和稳定性。 该制造方法包括以下步骤：在通道形成基板上形成通道形成层，并且对通道形成层的空间部分的区域赋予蚀刻选择性; 在通道形成层上形成振动板和压电元件; 在所述通道形成基板上进行各向异性蚀刻，至少形成到所述空间部分的区域，蚀刻所述通道形成层以形成所述空间部分，以及形成与所述空间部分相对的压力产生室; 并将喷嘴板接合到通道形成基板。
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2.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US06712456B2
公开(公告)日：2004-03-30
申请号：US09756292
申请日：2001-01-09
IPC分类号： B41J2045
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
摘要翻译： 公开了一种提高压电元件和压力发生室之间的相对位置精度的喷墨记录头，以改善喷墨特性和稳定性，能够以高密度排列压力发生室，并减少压力产生室之间的串扰。 此外，公开了其制造方法以及其中内置喷墨记录头的喷墨记录装置。喷墨记录头包括：具有形成在其中的压力发生室11的通道形成基板10， 其与喷嘴孔连通; 以及压电元件300，其通过构成压力发生室11的一部分的振动板，在与压力发生室11对应的区域中由薄膜和平版印刷法形成。喷墨记录头的特征在于， 与压力发生室11连通并且具有由振动板构成的至少一个表面的空间部分41设置在通道形成基板10和振动板之间的区域中，该区域与压力产生室11相对，并且在 靠近空间部41的压力发生室11的最小宽度被设定为等于空间部41的宽度以下，从而提高了压力发生室11与压电元件300之间的相对位置精度。
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公开(公告)号：US07381341B2
公开(公告)日：2008-06-03
申请号：US11037137
申请日：2005-01-19
申请人： Masato Shimada , Tetsushi Takahashi
发明人： Masato Shimada , Tetsushi Takahashi
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a reinforcing substrate for reinforcing the rigidity of the passage-forming substrate, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the reinforcing substrate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers. Thus, handling of the passage-forming substrate becomes easy, and the pressure generating chambers can be formed with high precision.
摘要翻译： 公开了一种制造液体喷射头的方法，其使得能够容易地处理通道形成基板，从而实现良好的压力发生室的形成和提高制造效率。 该方法包括以下步骤：在通道形成基板的一个表面上形成振动板和压电元件; 将用于增强通道形成基板的刚性的增强基板热粘附到通道形成基板上; 处理通道形成衬底以具有预定厚度; 在比通过用通路形成基板和增强基板粘接的温度低的温度下在通路形成基板的其他表面上沉积绝缘膜，并且将绝缘膜图案化成预定的形状; 并使用图案化的绝缘膜作为掩模蚀刻通道形成基板以形成压力发生室。 因此，通道形成基板的处理变得容易，可以高精度地形成压力发生室。
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公开(公告)号：US06764167B2
公开(公告)日：2004-07-20
申请号：US10446937
申请日：2003-05-29
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus. In an ink-jet recording head, comprising: a pressure generating chamber (12) communicating with a nozzle orifice; and a piezoelectric element (300) having a lower electrode (60), a piezoelectric layer (70) and an upper electrode (80), the piezoelectric element (300) being provided in a region corresponding to the pressure generating chamber (12) with a vibration plate interposed therebetween, the piezoelectric element (300) includes a piezoelectric active portion (320) as a substantial drive portion and a piezoelectric non-active portion (330) having the piezoelectric layer (70) continuous from the piezoelectric active portion (320) but not being substantially driven, and a stress suppression layer (100) for suppressing stress due to drive of the piezoelectric element (300) is provided, straddling a boundary between the piezoelectric active portion (320) and the piezoelectric non-active portion (330).
摘要翻译： 公开了一种喷墨记录头，其中喷嘴可以以高密度排列并且其制造成本降低，并且喷墨记录装置。 在喷墨记录头中，包括：与喷嘴孔连通的压力产生室（12）; 以及具有下电极（60），压电层（70）和上电极（80）的压电元件（300），所述压电元件（300）设置在与所述压力发生室（12）对应的区域中，所述压电元件 压电元件（300）包括作为实质驱动部分的压电有源部分（320）和压电非活性部分（330），其压电层（70）与压电有源部分（320）连续 ）而不是被大致驱动，并且设置用于抑制由于压电元件（300）的驱动引起的应力的应力抑制层（100），跨越压电有源部分（320）和压电非有效部分 330）。
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5.发明授权
公开(公告)号：US06126279A
公开(公告)日：2000-10-03
申请号：US107276
申请日：1998-06-30
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1634 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14387
摘要： An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.
摘要翻译： 喷墨打印头包括：加压室基板，其具有彼此相对的第一和第二边; 多个加压室，形成在加压室基板的第一侧上; 形成在加压室基板的第二侧上的通道分别与加压室相对; 用于对各加压室内的油墨进行加压的振动板膜; 以及压电薄膜元件，每个具有上电极和下电极以及夹在上电极和下电极之间的压电薄膜，压电薄膜形成在通道中，其中至少上电极形成为具有比 加压室的那个。 以及一种用于制造喷墨头的方法。
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6.发明申请Fluid injection head, method of manufacturing the injection head, and fluid injection device 有权流体注射头，注射头的制造方法和流体注射装置公开(公告)号：US20060152548A1
公开(公告)日：2006-07-13
申请号：US10520662
申请日：2003-07-10
IPC分类号： B41J2/135
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1606 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Provided is a liquid jet head, a method of manufacturing the same, and a liquid jet apparatus, in which liquid ejecting characteristics can be kept constant for a long period and in which nozzle blockage is prevented. In a liquid jet head including a passage-forming substrate (10) which is made of a single crystal silicon substrate and in which pressure generating chambers (12) communicating with nozzle orifices are formed, and pressure generating elements (300) for causing pressure changes in the pressure generating chambers (12), a protective film (100) which is made of tantalum oxide and has resistance to liquid, is provided at least on the inner wall surfaces of the pressure generating chambers (12).
摘要翻译： 本发明提供一种液体喷射头及其制造方法以及液体喷射装置，其中液体喷射特性可以长期保持恒定，并且防止喷嘴阻塞。 在包括由单晶硅基板制成的通道形成基板（10）的液体喷射头中，其中形成有与喷嘴孔连通的压力产生室（12）和用于引起压力变化的压力产生元件（300） 在压力发生室（12）中，至少在压力发生室（12）的内壁面上设置有由氧化钽制成并具有耐液体性的保护膜（100）。
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公开(公告)号：US06284434B1
公开(公告)日：2001-09-04
申请号：US09175319
申请日：1998-10-20
IPC分类号： G03F700
CPC分类号： H01L41/332 , H01L41/314
摘要： A piezoelectric thin film element is provided that functions well as an actuator, that yields the desired composition, and that exhibits good piezoelectric thin film distortion characteristics. A lower electrode is formed on a substrate, a piezoelectric thin film precursor thin film layer is formed on the lower electrode, this is subjected to patterning, and a heating solution is applied to the substrate to implement hydrothermal processing, thereby selectively crystallizing the precursor thin film layer and yielding a piezoelectric thin film layer.
摘要翻译： 提供了一种压电薄膜元件，其作为致动器的功能良好，其产生期望的组成，并且表现出良好的压电薄膜失真特性。 在基板上形成下电极，在下电极上形成压电薄膜前体薄膜层，对其进行图案化，将加热溶液施加到基板上进行水热处理，从而选择性地使前体薄膜 膜层并产生压电薄膜层。
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公开(公告)号：US07003857B1
公开(公告)日：2006-02-28
申请号：US09599440
申请日：2000-06-22
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , Y10T29/42 , Y10T29/49155 , Y10T29/49156 , Y10T29/49165 , Y10T29/49401
摘要： An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.
摘要翻译： 喷墨打印头包括：加压室基板，其具有彼此相对的第一和第二边; 多个加压室，形成在加压室基板的第一侧上; 形成在加压室基板的第二侧上的通道分别与加压室相对; 用于对各加压室内的油墨进行加压的振动板膜; 以及压电薄膜元件，每个具有上电极和下电极以及夹在上电极和下电极之间的压电薄膜，压电薄膜形成在通道中，其中至少上电极形成为具有比 加压室的那个。 以及一种用于制造喷墨头的方法。
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公开(公告)号：US20050185025A1
公开(公告)日：2005-08-25
申请号：US11037137
申请日：2005-01-19
申请人： Masato Shimada , Tetsushi Takahashi
发明人： Masato Shimada , Tetsushi Takahashi
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a reinforcing substrate for reinforcing the rigidity of the passage-forming substrate, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the reinforcing substrate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers. Thus, handling of the passage-forming substrate becomes easy, and the pressure generating chambers can be formed with high precision.
摘要翻译： 公开了一种制造液体喷射头的方法，其使得能够容易地处理通道形成基板，从而实现良好的压力发生室的形成和提高制造效率。 该方法包括以下步骤：在通道形成基板的一个表面上形成振动板和压电元件; 将用于增强通道形成基板的刚性的增强基板热粘附到通道形成基板上; 处理通道形成衬底以具有预定厚度; 在比通过用通路形成基板和增强基板粘接的温度低的温度下在通路形成基板的其他表面上沉积绝缘膜，并将绝缘膜图案化成预定的形状; 并使用图案化的绝缘膜作为掩模蚀刻通道形成基板以形成压力发生室。 因此，通道形成基板的处理变得容易，可以高精度地形成压力发生室。
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10.发明授权公开(公告)号：US06294860B1
公开(公告)日：2001-09-25
申请号：US09431088
申请日：1999-11-01
申请人： Masato Shimada , Tetsushi Takahashi , Hiroyuki Kamei , Hong Qiu
发明人： Masato Shimada , Tetsushi Takahashi , Hiroyuki Kamei , Hong Qiu
IPC分类号： H01L4108
CPC分类号： H01L41/318 , B41J2/14233 , B41J2002/14258 , C04B35/493 , C04B35/6264 , C04B2235/3206 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3241 , C04B2235/3251 , C04B2235/3255 , C04B2235/3258 , C04B2235/3262 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/3294 , C04B2235/3296 , C04B2235/441 , C04B2235/449 , C04B2235/656 , C04B2235/661 , C04B2235/76 , C04B2235/765 , C04B2235/768 , C04B2235/787 , C04B2235/80 , H01L41/0805 , H01L41/094 , H01L41/0973 , H01L41/1876 , H01L41/316
摘要： The present invention provides a thin piezoelectric film having a high piezoelectric strain constant and a good adhesion with a lower electrode which can be produced without being cracked. The present invention also provides an ink jet recording head comprising this thin piezoelectric film as a vibrator. The thin piezoelectric film element of the present invention comprises a PZT film 14 made of a polycrystalline substance, and an upper electrode 16 and a lower electrode 12 arranged with the PZT film interposed therebetween. The grain boundary of the crystalline constituting the PZT film is present almost perpendicular to the surface of the electrode. Further, the orientation of the crystalline constituting the PZT film is controlled to a desired range.
摘要翻译： 本发明提供了一种具有高压电应变常数和与下部电极的良好粘合性的薄压电薄膜，可以在不破裂的情况下制造。 本发明还提供了一种喷墨记录头，其包括该薄压电薄膜作为振动器。 本发明的薄压电薄膜元件包括由多晶物质制成的PZT薄膜14，以及配置有PZT薄膜的上电极16和下电极12。 构成PZT膜的晶体的晶界几乎垂直于电极的表面。 此外，构成PZT膜的晶体的取向被控制在期望的范围。
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