发明授权
US06766209B2 Managing system, managing method, host computer, and information collecting/transmitting unit 有权
管理系统,管理方法,主机,信息收集/发送单元

Managing system, managing method, host computer, and information collecting/transmitting unit
摘要:
The present invention is a managing system for managing a processing system of a substrate and it has an information accumulation section for accumulating information on the processing system, an information collecting unit for collecting the information from the information accumulation section, and a managing unit for obtaining the information in the information collecting unit via the Internet or an intranet to manage the processing system based on this information.
信息查询
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