发明授权
- 专利标题: Method for fabricating CMOS transistor
- 专利标题(中): 制造CMOS晶体管的方法
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申请号: US10331590申请日: 2002-12-31
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公开(公告)号: US06767780B2公开(公告)日: 2004-07-27
- 发明人: Yong-Sun Sohn , Chang-Woo Ryoo , Jeong-Youb Lee
- 申请人: Yong-Sun Sohn , Chang-Woo Ryoo , Jeong-Youb Lee
- 优先权: KR2002-0029020 20020524
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
A method for fabricating a CMOS transistor is disclosed. The present invention provides a method for producing a CMOS transistor having enhanced performance since a short channel characteristic and operation power can be controlled by the duplicate punch stop layer of the pMOS region and the operation power of the nMOS is also controlled by dopant concentration of the duplicated LDD region combined by the first LDD region and the second LDD region.
公开/授权文献
- US20030218219A1 MOS transistor and method for fabricating the same 公开/授权日:2003-11-27
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