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US06767780B2 Method for fabricating CMOS transistor 有权
制造CMOS晶体管的方法

Method for fabricating CMOS transistor
摘要:
A method for fabricating a CMOS transistor is disclosed. The present invention provides a method for producing a CMOS transistor having enhanced performance since a short channel characteristic and operation power can be controlled by the duplicate punch stop layer of the pMOS region and the operation power of the nMOS is also controlled by dopant concentration of the duplicated LDD region combined by the first LDD region and the second LDD region.
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