- Patent Title: Stacked gate flash memory device and method of fabricating the same
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Application No.: US10725052Application Date: 2003-12-01
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Publication No.: US06768164B2Publication Date: 2004-07-27
- Inventor: Chi-Hui Lin , Chung-Lin Huang
- Applicant: Chi-Hui Lin , Chung-Lin Huang
- Priority: TW91124260A 20021021
- Main IPC: H01L29788
- IPC: H01L29788

Abstract:
A stacked gate flash memory device and method of fabricating the same. A cell of the stacked gate flash memory device in accordance with the invention is disposed in a cell trench within a substrate and source and drain regions are formed in the same substrate side of the adjacent isolation trenches. Thus, the stacked gate flash memory device of the invention can achieve high integration of memory cells.
Public/Granted literature
- US20040108542A1 STACKED GATE FLASH MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2004-06-10
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