- 专利标题: Stacked gate flash memory device and method of fabricating the same
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申请号: US10725052申请日: 2003-12-01
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公开(公告)号: US06768164B2公开(公告)日: 2004-07-27
- 发明人: Chi-Hui Lin , Chung-Lin Huang
- 申请人: Chi-Hui Lin , Chung-Lin Huang
- 优先权: TW91124260A 20021021
- 主分类号: H01L29788
- IPC分类号: H01L29788
摘要:
A stacked gate flash memory device and method of fabricating the same. A cell of the stacked gate flash memory device in accordance with the invention is disposed in a cell trench within a substrate and source and drain regions are formed in the same substrate side of the adjacent isolation trenches. Thus, the stacked gate flash memory device of the invention can achieve high integration of memory cells.
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