发明授权
US06803267B1 Silicon containing material for patterning polymeric memory element
有权
含硅材料用于图案化聚合物记忆元件
- 专利标题: Silicon containing material for patterning polymeric memory element
- 专利标题(中): 含硅材料用于图案化聚合物记忆元件
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申请号: US10614484申请日: 2003-07-07
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公开(公告)号: US06803267B1公开(公告)日: 2004-10-12
- 发明人: Ramkumar Subramanian , Christopher F. Lyons , Matthew S. Buynoski , Patrick K. Cheung , Angela T. Hui , Ashok M. Khathuria , Sergey D. Lopatin , Minh Van Ngo , Jane V. Oglesby , Terence C. Tong , James J. Xie
- 申请人: Ramkumar Subramanian , Christopher F. Lyons , Matthew S. Buynoski , Patrick K. Cheung , Angela T. Hui , Ashok M. Khathuria , Sergey D. Lopatin , Minh Van Ngo , Jane V. Oglesby , Terence C. Tong , James J. Xie
- 主分类号: H01L21336
- IPC分类号: H01L21336
摘要:
The present invention provides a method to fabricate an organic memory device, wherein the fabrication method includes forming a lower electrode, depositing a passive material over the surface of the lower electrode, applying an organic semiconductor material over the passive material, and operatively coupling the an upper electrode to the lower electrode through the organic semiconductor material and the passive material. Patterning of the organic semiconductor material is achieved by depositing a silicon-based resist over the organic semiconductor, irradiating portions of the silicon-based resist and patterning the silicon-based resist to remove the irradiated portions of the silicon-based resist. Thereafter, the exposed organic semiconductor can be patterned, and the non-irradiated silicon-based resist can be stripped to expose the organic semiconductor material that can be employed as a memory cell for single and multi-cell memory devices. A partitioning component can be integrated with the memory device to facilitate stacking memory devices and programming, reading, writing and erasing memory elements.
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