发明授权
US06813572B2 Apparatus and methods for managing reliability of semiconductor devices
有权
用于管理半导体器件的可靠性的装置和方法
- 专利标题: Apparatus and methods for managing reliability of semiconductor devices
- 专利标题(中): 用于管理半导体器件的可靠性的装置和方法
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申请号: US10281432申请日: 2002-10-24
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公开(公告)号: US06813572B2公开(公告)日: 2004-11-02
- 发明人: Akella V.S. Satya , Li Song , Robert Thomas Long , Kurt H. Weiner
- 申请人: Akella V.S. Satya , Li Song , Robert Thomas Long , Kurt H. Weiner
- 主分类号: G06F1900
- IPC分类号: G06F1900
摘要:
Disclosed are methods and apparatus for determining whether to perform burn-in on a semiconductor product, such as a product wafer or product wafer lot. In general terms, test structures on the semiconductor product are inspected to extract yield information, such as defect densities. Since this yield information is related to the early or extrinsic instantaneous failure rate, one may then determine the instantaneous extrinsic failure rate for one or more failure mechanisms, such as electromigration, gate oxide breakdown, or hot carrier injection, based on this yield information. It is then determined whether to perform burn-in on the semiconductor product based on the determined instantaneous failure rate.
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