发明授权
US06854338B2 Fluidic device with integrated capacitive micromachined ultrasonic transducers
失效
具有集成电容微机械超声换能器的流体装置
- 专利标题： Fluidic device with integrated capacitive micromachined ultrasonic transducers
- 专利标题（中）： 具有集成电容微机械超声换能器的流体装置
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申请号： US09905087申请日： 2001-07-12
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公开(公告)号： US06854338B2公开(公告)日： 2005-02-15
- 发明人: Butrus T. Khuri-Yakub , F. Levent Degertekin
- 申请人： Butrus T. Khuri-Yakub , F. Levent Degertekin
- 申请人地址： US CA Stanford
- 专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址： US CA Stanford
- 代理机构： Dorsey & Whitney LLP
- 主分类号： G01F1/66
- IPC分类号： G01F1/66 ; G01N29/02 ; G01N29/22
摘要：
The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.
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