发明授权
- 专利标题： Carrier head with a flexure
- 专利标题（中）： 承载头弯曲
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申请号： US10353326申请日： 2003-01-28
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公开(公告)号： US06857946B2公开(公告)日： 2005-02-22
- 发明人: Steven M. Zuniga , Manoocher Birang , Hung Chen , Sen-Hou Ko
- 申请人： Steven M. Zuniga , Manoocher Birang , Hung Chen , Sen-Hou Ko
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials Inc.
- 当前专利权人： Applied Materials Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Fish & Richardson
- 主分类号： B24B37/30
- IPC分类号： B24B37/30 ; B24B37/32 ; B24B49/16 ; H01L21/304 ; B24B1/00
摘要：
A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. The substrate backing assembly includes a support structure positioned below the base, a substantially horizontal, annular flexure connecting the support structure to the base, and a flexible membrane connected to the support structure. The flexible membrane has a mounting surface for a substrate, and extends beneath the base to define a chamber.
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