发明授权
- 专利标题: Method for creation of a very narrow emitter feature
- 专利标题(中): 用于创建非常窄的发射器特征的方法
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申请号: US10249780申请日: 2003-05-07
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公开(公告)号: US06858485B2公开(公告)日: 2005-02-22
- 发明人: Gregory G. Freeman , Marwan H. Khater , Francois Pagette , Andreas D. Stricker
- 申请人: Gregory G. Freeman , Marwan H. Khater , Francois Pagette , Andreas D. Stricker
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Graham S. Jones, III; H. Daniel Schnurmann
- 主分类号: H01L21/331
- IPC分类号: H01L21/331 ; H01L29/08 ; H01L29/732 ; H01L21/8238
摘要:
A double-polysilicon, self-aligned bipolar transistor has a collector region formed in a doped semiconductor substrate, an intrinsic counterdoped base formed on the surface of the substrate and a doped emitter formed in the surface of the intrinsic base. Form an etch stop dielectric layer over the intrinsic base layer above the collector. Form a base contact layer of a conductive material over the etch stop dielectric layer and the intrinsic base layer. Form a second dielectric layer over the base contact layer. Etch a wide window through the dielectric layer and the base contact layer stopping the etching of the window at the etch stop dielectric layer. Form an island or a peninsula narrowing the wide window leaving at least one narrowed window within the wide window. Form sidewall spacers in the either the wide window or the narrowed window. Fill the windows with doped polysilicon to form an extrinsic emitter. Form an emitter below the extrinsic emitter in the surface of the intrinsic base.
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