发明授权
- 专利标题: System for oxide stress testing
- 专利标题(中): 氧化物应力测试系统
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申请号: US10746984申请日: 2003-12-24
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公开(公告)号: US06864702B1公开(公告)日: 2005-03-08
- 发明人: Ross E. Teggatz , Reed W. Adams , Suribhotla V. Rajasekhar
- 申请人: Ross E. Teggatz , Reed W. Adams , Suribhotla V. Rajasekhar
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 J. Dennis Moore; W. James Brady III; Frederick J. Telecky, Jr.
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/27
摘要:
The present invention provides a system for stress testing an oxide structure to determine that structure's reliability in overstress conditions. The present invention provides an overstress test structure (400) that comprises a first transistor (406), having a first terminal coupled to ground, a second terminal coupled to a control signal (402), and a third terminal coupled to a first end of a first resistive element (412). A first voltage source (414) is coupled to the second end of the first resistive element. A second resistive element (416) is intercoupled between the second end of the first resistive element and ground. A second transistor (418) has a first terminal coupled to the second end of the first resistive element, a second terminal coupled to the first end of the first resistive element, and a third terminal coupled to a first node (420). A third resistive element (422) is intercoupled between the third terminal of the second transistor and ground; and a third transistor (424) has a first terminal coupled (426) to the oxide structure, a second terminal coupled to the first end of the first resistive elerment, and a third terminal coupled to a second voltage source (428).