Invention Grant
US06870216B2 Stack gate with tip vertical memory and method for fabricating the same
有权
具有尖端垂直存储器的堆叠门及其制造方法
- Patent Title: Stack gate with tip vertical memory and method for fabricating the same
- Patent Title (中): 具有尖端垂直存储器的堆叠门及其制造方法
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Application No.: US10606702Application Date: 2003-06-26
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Publication No.: US06870216B2Publication Date: 2005-03-22
- Inventor: Ching-Nan Hsiao , Ying-Cheng Chuang , Chi-Hui Lin
- Applicant: Ching-Nan Hsiao , Ying-Cheng Chuang , Chi-Hui Lin
- Applicant Address: TW Taoyuan
- Assignee: Nanya Technology Corporation
- Current Assignee: Nanya Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Quintero Law Office
- Priority: TW92100981A 20030117
- Main IPC: H01L21/8247
- IPC: H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/72

Abstract:
A stacked gate vertical flash memory and a fabrication method thereof. The stacked gate vertical flash memory comprises a semiconductor substrate with a trench, a source conducting layer formed on the bottom of the trench, an insulating layer formed on the source conducting layer, a gate dielectric layer formed on a sidewall of the trench, a conducting spacer covering the gate dielectric layer as a floating gate, an inter-gate dielectric layer covering the conducting spacer, and a control gate conducting layer filled in the trench.
Public/Granted literature
- US20040140500A1 Stack gate with tip vertical memory and method for fabricating the same Public/Granted day:2004-07-22
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