Invention Grant
US06870216B2 Stack gate with tip vertical memory and method for fabricating the same 有权
具有尖端垂直存储器的堆叠门及其制造方法

Stack gate with tip vertical memory and method for fabricating the same
Abstract:
A stacked gate vertical flash memory and a fabrication method thereof. The stacked gate vertical flash memory comprises a semiconductor substrate with a trench, a source conducting layer formed on the bottom of the trench, an insulating layer formed on the source conducting layer, a gate dielectric layer formed on a sidewall of the trench, a conducting spacer covering the gate dielectric layer as a floating gate, an inter-gate dielectric layer covering the conducting spacer, and a control gate conducting layer filled in the trench.
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