发明授权
US06872654B2 Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
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制造用于集成电路气隙电介质的双马来酰亚胺(BMI)ASA牺牲材料的方法
- 专利标题: Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
- 专利标题(中): 制造用于集成电路气隙电介质的双马来酰亚胺(BMI)ASA牺牲材料的方法
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申请号: US10330619申请日: 2002-12-26
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公开(公告)号: US06872654B2公开(公告)日: 2005-03-29
- 发明人: Tian-An Chen , Kevin P. O'Brien
- 申请人: Tian-An Chen , Kevin P. O'Brien
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理商 Ami Patel Shah
- 主分类号: H01L21/312
- IPC分类号: H01L21/312 ; H01L21/768 ; H01L21/4763
摘要:
A method for implementing a bismaleimide (BMI) polymer as a sacrificial material for an integrated circuit air gap dielectric. The method of one embodiment comprises forming a first and second metal interconnect lines on a substrate, wherein at least a portion of the first and second metal interconnect lines extend parallel to one another and wherein a trough is located between the parallel portion of said first and second metal interconnect lines. A layer of bismaleimide is spin coated over the substrate. The layer of bismaleimide is polished with a chemical mechanical polish, wherein the trough remains filled with the bismaleimide. A diffusion layer is formed over the substrate. The substrate is heated to activate a pyrolysis of the bismaleimide. An air gap is formed in the trough in the space vacated by the bismaleimide.
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