发明授权
US06872654B2 Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric 失效
制造用于集成电路气隙电介质的双马来酰亚胺(BMI)ASA牺牲材料的方法

  • 专利标题: Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
  • 专利标题(中): 制造用于集成电路气隙电介质的双马来酰亚胺(BMI)ASA牺牲材料的方法
  • 申请号: US10330619
    申请日: 2002-12-26
  • 公开(公告)号: US06872654B2
    公开(公告)日: 2005-03-29
  • 发明人: Tian-An ChenKevin P. O'Brien
  • 申请人: Tian-An ChenKevin P. O'Brien
  • 申请人地址: US CA Santa Clara
  • 专利权人: Intel Corporation
  • 当前专利权人: Intel Corporation
  • 当前专利权人地址: US CA Santa Clara
  • 代理商 Ami Patel Shah
  • 主分类号: H01L21/312
  • IPC分类号: H01L21/312 H01L21/768 H01L21/4763
Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
摘要:
A method for implementing a bismaleimide (BMI) polymer as a sacrificial material for an integrated circuit air gap dielectric. The method of one embodiment comprises forming a first and second metal interconnect lines on a substrate, wherein at least a portion of the first and second metal interconnect lines extend parallel to one another and wherein a trough is located between the parallel portion of said first and second metal interconnect lines. A layer of bismaleimide is spin coated over the substrate. The layer of bismaleimide is polished with a chemical mechanical polish, wherein the trough remains filled with the bismaleimide. A diffusion layer is formed over the substrate. The substrate is heated to activate a pyrolysis of the bismaleimide. An air gap is formed in the trough in the space vacated by the bismaleimide.
信息查询
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L21/00 专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02 .半导体器件或其部件的制造或处理
H01L21/04 ..至少具有一个跃变势垒或表面势垒的器件,例如PN结、耗尽层、载体集结层
H01L21/18 ...器件有由周期表Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料
H01L21/30 ....用H01L21/20至H01L21/26各组不包含的方法或设备处理半导体材料的(在半导体材料上制作电极的入H01L21/28)
H01L21/31 .....在半导体材料上形成绝缘层的,例如用于掩膜的或应用光刻技术的(密封层入H01L21/56);以及这些层的后处理;这些层的材料的选择
H01L21/312 ......有机层,例如光刻胶(H01L21/3105、H01L21/32优先)
0/0