发明授权
- 专利标题： Optical component thickness adjustment method and optical component
- 专利标题（中）： 光学元件厚度调整方法和光学元件
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申请号： US10764508申请日： 2004-01-27
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公开(公告)号： US06876498B2公开(公告)日： 2005-04-05
- 发明人: Kenji Hori
- 申请人： Kenji Hori
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2001-000278 20010105; JP2001-383861 20011218
- 主分类号： G02B3/00
- IPC分类号： G02B3/00 ; G02B5/00 ; G02B7/00 ; G02B7/02 ; C23C16/00
摘要：
If after manufacture it is found that the thickness of a solid immersion lens is less than a target thickness value, an adjustment portion is adhered thereto by vapor deposition so as to reduce the amount of thickness deficiency. If the solid immersion lens is made of quartz glass, SiO2 is used as the material which is vapor deposited. If the thickness of the solid immersion lens is greater than the target value, then it is reduced by etching.