发明授权
- 专利标题: Method for manufacturing gallium nitride-based semiconductor light emitting device
- 专利标题(中): 氮化镓系半导体发光元件的制造方法
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申请号: US10735615申请日: 2003-12-16
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公开(公告)号: US06893889B2公开(公告)日: 2005-05-17
- 发明人: Young Ho Park , Hun Joo Hahm , Soo Min Lee
- 申请人: Young Ho Park , Hun Joo Hahm , Soo Min Lee
- 申请人地址: KR Kyungei-do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Kyungei-do
- 代理机构: Lowe Hauptman & Berner, LLP
- 优先权: KR10-2003-0041173 20030624
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L33/20 ; H01L33/32 ; H01L33/42 ; H01L33/44 ; H01L29/06 ; H01L31/0336 ; H01L31/109
摘要:
A method of manufacturing a gallium nitride-based semiconductor light emitting device, includes sequentially forming, over a substrate, a first conductivity type clad layer, an active layer, and a second conductivity type clad layer, forming a transparent electrode over the second conductivity type clad layer, forming a photoresist film on the transparent electrode such that the transparent electrode is exposed at a predetermined region, removing respective portions of the transparent electrode, second conductivity type clad layer, and active layer corresponding to the predetermined region, thereby partially exposing the first conductivity type clad layer, removing the photoresist film, and forming first and second bonding electrodes on predetermined portions of the transparent electrode and second conductivity type clad layer, respectively.
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