发明授权
- 专利标题: Front-opening unified pod auto-loading structure
- 专利标题(中): 前开口统一吊舱自动装载结构
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申请号: US09705733申请日: 2000-11-06
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公开(公告)号: US06896470B1公开(公告)日: 2005-05-24
- 发明人: Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
- 申请人: Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rabin & Berdo, P.C.
- 优先权: TW89215578U 20000908
- 主分类号: B65G65/34
- IPC分类号: B65G65/34 ; H01L21/677 ; H01L21/68
摘要:
The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.
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