公开(公告)号：US06382896B1

公开(公告)日：2002-05-07

申请号：US09705728

申请日：2000-11-06

申请人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

发明人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  Y10S414/137 ,  Y10S414/139

摘要： A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.

摘要翻译： 前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达，使传动轴通过两个蜗杆转动两个蜗轮组，每个蜗轮组包括与一个蜗杆啮合的蜗轮， 固定在蜗轮上的径向延伸的定位板，以及具有矩形中心孔的垫圈构件，分别装配在矩形中心孔中的两个致动螺栓，并通过相应的螺母固定到蜗轮组，保持蜗杆的定位板 齿轮组保持直角，两个第一止动销适于在第一位置停止蜗轮组的定位板，其中致动螺栓关闭FOUP的盖子，以及两个第二止动销，其适于停止定位板 蜗轮组处于第二位置，其中致动螺栓打开FOUP的盖。

公开(公告)号：US06352005B1

公开(公告)日：2002-03-05

申请号：US09544564

申请日：2000-04-06

申请人： Wu-Lang Lin ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Jiann-Cherng Chen

发明人： Wu-Lang Lin ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Jiann-Cherng Chen

IPC分类号： F16H2702

CPC分类号： F16H25/20 ,  B23Q5/40 ,  F16H25/2204 ,  Y10T74/18624 ,  Y10T74/18648

摘要： A two screw double-stroke and screw differential-motion mechanism is applied in a standard mechanical interface. The two mechanisms are utilized for the correlation of transmission between screws and nuts and the screw differential-motion, so as to achieve more efficient positioning and clamp retrieval and placement.

摘要翻译： 标准机械接口应用双螺杆双冲程和螺杆差动运动机构。 这两种机构用于螺钉和螺母之间的传动与螺丝差速运动的相关性，以便实现更有效的定位和夹具检索和放置。

公开(公告)号：US07444043B2

公开(公告)日：2008-10-28

申请号：US11843421

申请日：2007-08-22

申请人： Kuang-Chao Fan ,  Wu-Lang Lin ,  Tien-Tung Chung ,  Yao-Joe Yang

发明人： Kuang-Chao Fan ,  Wu-Lang Lin ,  Tien-Tung Chung ,  Yao-Joe Yang

IPC分类号： G02B6/26 ,  G02B6/42

CPC分类号： G02B6/3514 ,  G02B6/3546 ,  G02B6/3582

摘要： A 2×2 mechanical optical switch includes a base, four collimators (two input collimators and two output collimators), an ultra thin mirror (double-sided reflection) and a switching mechanism of the mirror. This switch utilizes four collimators, which are arranged 90° with each other on a common plane, to emit and receive parallel light beams at a certain distance. The light beams are reflected by an ultra thin mirror. When the mirror is moved away from the intersection point of two optical paths, the input lights will directly enter into output channels (transmission state). While the mirror is moved to the intersection point which is the reflection position, the optical beams will be bent into alternate output channels (reflection state) simultaneously from both sides of the ultra thin mirror.

摘要翻译： 一个2x2机械光开关包括一个基座，四个准直器（两个输入准直器和两个输出准直器），一个超薄镜（双面反射）和一个反射镜的切换机构。 该开关使用四个准直器，它们在公共平面上彼此成90°布置，以一定距离发射和接收平行光束。 光束被超薄镜反射。 当镜子离开两个光路的交点时，输入灯将直接进入输出通道（发送状态）。 当镜子移动到作为反射位置的交点时，光束将从超薄镜的两侧同时弯曲成交替的输出通道（反射状态）。

公开(公告)号：US06669185B2

公开(公告)日：2003-12-30

申请号：US09736664

申请日：2000-12-08

申请人： Wu-Lang Lin ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Muh-Wang Liang ,  Kuei-Jung Chen ,  Tzong-Ming Wu

发明人： Wu-Lang Lin ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Muh-Wang Liang ,  Kuei-Jung Chen ,  Tzong-Ming Wu

IPC分类号： B65G6534

CPC分类号： H01L21/67775 ,  Y10S269/903 ,  Y10S414/137

摘要： A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

公开(公告)号：US06220771B1

公开(公告)日：2001-04-24

申请号：US09461349

申请日：1999-12-15

申请人： Fu-Ching Tung ,  Hong-Ming Chen ,  Wu-Lang Lin ,  Chia-Ming Chen ,  Jen-Rong Huang ,  Peter L. Mahneke ,  Janathan Wang

发明人： Fu-Ching Tung ,  Hong-Ming Chen ,  Wu-Lang Lin ,  Chia-Ming Chen ,  Jen-Rong Huang ,  Peter L. Mahneke ,  Janathan Wang

IPC分类号： G03D500

CPC分类号： H01L21/6708 ,  G03F7/707 ,  G03F7/70916 ,  H01L21/67028

摘要： A wafer backside protection apparatus includes a motor, a vacuum chuck, an annular seat and a top cover. The motor has an output shaft upon which the chuck is mounted. The chuck has a front surface to suck and hold a wafer from its backside. The chuck has a backside in which a water guard ring and a plurality of slant bores are formed. The slant bores run from the water guard ring through the wafer front surface. The annular seat is located below the chuck and has two symmetrical slant nozzles projecting toward motor rotating direction for ejecting protection liquid to the water guard ring. Protection liquid may be spun and splashed out through the slant bores to form a protection liquid film between the chuck and the wafer backside due to centrifugal force resulting from chuck and wafer rotation driven by the motor. The protection liquid film may protect wafer backside from chemical erosion and contamination resulting from wafer production process.

摘要翻译： 晶片背面保护装置包括电动机，真空吸盘，环形座和顶盖。 马达具有输出轴，卡盘安装在该输出轴上。 卡盘具有从其背面吸取并保持晶片的前表面。 卡盘具有背面，其中形成有防水环和多个倾斜孔。 倾斜的孔从防水环穿过晶片正面。 环形座位于卡盘下方，并具有朝向马达旋转方向突出的两个对称倾斜喷嘴，用于将防护液喷射到防水环上。 保护液体可以通过倾斜孔旋转溅出，由卡盘和由马达驱动的晶片旋转产生的离心力在卡盘和晶片背面之间形成保护液膜。 保护液膜可以保护晶片背面免受晶片生产过程中的化学侵蚀和污染。

公开(公告)号：US20210370478A1

公开(公告)日：2021-12-02

申请号：US16888980

申请日：2020-06-01

申请人： Wu-Lang Lin

发明人： Wu-Lang Lin

IPC分类号： B25B7/08

摘要： A pliers includes two main bodies pivotally coupled to one another. A first main body defines a first pivot hole and a second main body defines a second pivot hole respectively. The first pivot hole has a first inner peripheral section with a flaring conical shape. Furthermore, the first pivot hole has a second inner peripheral section with a flaring conical shape. The first inner peripheral section has a first cone angle and the second inner peripheral section has a second cone angle respectively. The second cone angle is smaller than the first cone angle. The first and the second main bodies are pivotally interconnected with a fastener. The fastener has a first outer peripheral section abutting and conforming to the first inner peripheral section and a second outer peripheral section abutting and conforming to the second inner peripheral section respectively.

公开(公告)号：US20080175534A1

公开(公告)日：2008-07-24

申请号：US11843421

申请日：2007-08-22

申请人： Kuang-Chao FAN ,  Wu-Lang LIN ,  Tien-Tung CHUNG ,  Yao-Joe YANG

发明人： Kuang-Chao FAN ,  Wu-Lang LIN ,  Tien-Tung CHUNG ,  Yao-Joe YANG

IPC分类号： G02B6/42

CPC分类号： G02B6/3514 ,  G02B6/3546 ,  G02B6/3582

摘要： A 2×2 mechanical optical switch includes a base, four collimators (two input collimators and two output collimators), an ultra thin mirror (double-sided reflection) and a switching mechanism of the mirror. This switch utilizes four collimators, which are arranged 90° with each other on a common plane, to emit and receive parallel light beams at a certain distance. The light beams are reflected by an ultra thin mirror. When the mirror is moved away from the intersection point of two optical paths, the input lights will directly enter into output channels (transmission state). While the mirror is moved to the intersection point which is the reflection position, the optical beams will be bent into alternate output channels (reflection state) simultaneously from both sides of the ultra thin mirror.

摘要翻译： 一个2x2机械光开关包括一个基座，四个准直器（两个输入准直器和两个输出准直器），一个超薄镜（双面反射）和一个反射镜的切换机构。 该开关使用四个准直器，它们在公共平面上彼此成90°布置，以一定距离发射和接收平行光束。 光束被超薄镜反射。 当镜子离开两个光路的交点时，输入灯将直接进入输出通道（发送状态）。 当镜子移动到作为反射位置的交点时，光束将从超薄镜的两侧同时弯曲成交替的输出通道（反射状态）。

公开(公告)号：US06896470B1

公开(公告)日：2005-05-24

申请号：US09705733

申请日：2000-11-06

申请人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

发明人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

IPC分类号： B65G65/34 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

摘要翻译： 本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。 托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过 水平移动机构，并由提升机构降低。 相反，盖子在FOUP上关闭。 因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。