公开(公告)号：US20110282355A1

公开(公告)日：2011-11-17

申请号：US12849992

申请日：2010-08-04

申请人： Shih-Tseng LEE ,  Wen-Yo LEE ,  Heng-Liang LIU

发明人： Shih-Tseng LEE ,  Wen-Yo LEE ,  Heng-Liang LIU

IPC分类号： A61B19/00

CPC分类号： A61B34/70

摘要： The primary objective of the present invention is to provide a positioning device for surgical operation, which could allow a surgical tool to be positioned precisely at a specific operating spot or a specific operating angle by providing a three axial free-moving function and a vertical and horizontal free-rotating function. Furthermore, the present invention is able to be electrically connected to and controlled by an automatic control system to achieve a more precise and efficient positioning function.

摘要翻译： 本发明的主要目的是提供一种用于外科手术的定位装置，其可通过提供三个轴向自由移动功能和垂直和/或垂直的方式使手术工具精确地定位在特定的操作点或特定的操作角度 水平自由旋转功能。 此外，本发明能够与自动控制系统电连接并控制，以实现更精确和高效的定位功能。

公开(公告)号：US06694201B1

公开(公告)日：2004-02-17

申请号：US09639984

申请日：2000-08-17

申请人： Wen-Yo Lee ,  Chun-Hung Liu ,  Chien-Rong Huang ,  Shao-Kung Chang ,  Jou Chyn

发明人： Wen-Yo Lee ,  Chun-Hung Liu ,  Chien-Rong Huang ,  Shao-Kung Chang ,  Jou Chyn

IPC分类号： G06F1900

CPC分类号： G05B19/4184 ,  G05B2219/31202 ,  G05B2219/31253 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/24

摘要： A supervisory parallel switching device is designed for use with a CIM system including a host computer unit connected via an extended computer integrated unit to at least one equipment unit through an SECS-compliant (Semiconductor Equipment Communication Standard) serial communication link, for the purpose of allowing the equipment unit to be continuously under computer control even in the event of an unanticipated shutdown to the extended computer integrated unit. The supervisory parallel switching device includes a plurality of switching units, such as relays, under control by a control logic unit to be switched on in such a manner that, when the extended computer integrated unit operates normally, the control logic unit activates these switching units to connect both the equipment unit and the host computer unit to the extended computer integrated unit, allowing the equipment unit to be chiefly controlled by the extended computer integrated unit; while in the event of an unanticipated shutdown to the extended computer integrated unit, the control logic unit activates these switching units to connect the equipment unit directly to the host computer unit, thus allowing the equipment unit to be continuously controlled by the host computer unit. This feature allows each equipment unit in the CIM system to be uninterrupted in its fabrication process even where there is power failure or system crash in the extended computer integrated unit.

摘要翻译： 一种监控并行切换装置被设计用于包括通过扩展计算机集成单元通过符合SECS（半导体设备通信标准）串行通信链路连接到至少一个设备单元的主机计算机单元的CIM系统，用于 即使在意外关闭扩展计算机集成单元的情况下，也允许设备单元连续地进行计算机控制。 监控并行开关装置包括多个开关单元，例如继电器，由控制逻辑单元控制，以便当扩展计算机集成单元正常运行时，控制逻辑单元激活这些开关单元 将设备单元和主机单元连接到扩展计算机集成单元，允许设备单元主要由扩展计算机集成单元控制; 而在扩展计算机集成单元意外关闭的情况下，控制逻辑单元激活这些切换单元，将设备单元直接连接到主机单元，从而允许设备单元由主机单元持续控制。 此功能允许CIM系统中的每个设备单元在其制造过程中不间断，即使在扩展计算机集成单元中出现电源故障或系统崩溃。

公开(公告)号：US06896470B1

公开(公告)日：2005-05-24

申请号：US09705733

申请日：2000-11-06

申请人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

发明人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

IPC分类号： B65G65/34 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

摘要翻译： 本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。 托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过 水平移动机构，并由提升机构降低。 相反，盖子在FOUP上关闭。 因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

公开(公告)号：US20090184834A1

公开(公告)日：2009-07-23

申请号：US12017341

申请日：2008-01-22

申请人： Ko-Wen Chiu ,  Wen-Yo Lee ,  Kai-Che Chang

发明人： Ko-Wen Chiu ,  Wen-Yo Lee ,  Kai-Che Chang

IPC分类号： G08B21/18 ,  G05B19/40

CPC分类号： G05B19/4062 ,  G05B2219/41219 ,  G05B2219/41326 ,  G05B2219/42226

摘要： A method for monitoring a step motor is provided, wherein the step motor rotates from a start position to an end position and then back to the start position repeatedly. The monitoring method includes: detecting a status signal of the step motor and a command signal received by the step motor in real time; recording a variation of the difference between the command signal and the status signal vs. time as an error data; and determining whether the step motor is starting from the start position, in action, reaching the end position, or returning to the start position according to the status signal and the command signal. If it is determined that the step motor is in action, the error data is recorded as a tracking error, and whether an alarm is issued is determined according to the tracking error.

摘要翻译： 提供了一种用于监测步进电动机的方法，其中步进电动机从起始位置旋转到结束位置，然后重新回到起始位置。 监视方法包括：实时检测步进电机的状态信号和步进电机接收到的指令信号; 记录命令信号与状态信号与时间之差的变化作为误差数据; 以及根据状态信号和命令信号确定步进电动机是从开始位置起作用，到达结束位置还是返回到起始位置。 如果确定步进电机处于动作状态，则将误差数据记录为跟踪误差，并根据跟踪误差确定是否发出报警。

公开(公告)号：US08366721B2

公开(公告)日：2013-02-05

申请号：US12849992

申请日：2010-08-04

申请人： Shih-Tseng Lee ,  Wen-Yo Lee ,  Heng-Liang Liu

发明人： Shih-Tseng Lee ,  Wen-Yo Lee ,  Heng-Liang Liu

IPC分类号： A61B19/00

CPC分类号： A61B34/70

摘要： The primary objective of the present invention is to provide a positioning device for surgical operation, which could allow a surgical tool to be positioned precisely at a specific operating spot or a specific operating angle by providing a three axial free-moving function and a vertical and horizontal free-rotating function. Furthermore, the present invention is able to be electrically connected to and controlled by an automatic control system to achieve a more precise and efficient positioning function.

摘要翻译： 本发明的主要目的是提供一种用于外科手术的定位装置，其可通过提供三个轴向自由移动功能和垂直和/或垂直的方式使手术工具精确地定位在特定的操作点或特定的操作角度 水平自由旋转功能。 此外，本发明能够与自动控制系统电连接并控制，以实现更精确和高效的定位功能。