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11 条记录 (耗时 0.027 秒)

    Front-opening unified pod auto-loading structure
    1.
    发明授权
    Front-opening unified pod auto-loading structure 有权
    前开口统一吊舱自动装载结构

    公开(公告)号：US06896470B1

    公开(公告)日：2005-05-24

    申请号：US09705733

    申请日：2000-11-06

    申请人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

    发明人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

    IPC分类号： B65G65/34 ,  H01L21/677 ,  H01L21/68

    CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

    摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

    摘要翻译： 本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。 托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过 水平移动机构，并由提升机构降低。 相反，盖子在FOUP上关闭。 因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

    Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus
    5.
    发明授权
    Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus 有权
    用于脆性材料划线和/或断裂装置的脆性材料旋转和对准机构

    公开(公告)号：US06892917B2

    公开(公告)日：2005-05-17

    申请号：US10358207

    申请日：2003-02-05

    申请人： Kuei-Jung Chen ,  Chin-Chong Chiang

    发明人： Kuei-Jung Chen ,  Chin-Chong Chiang

    IPC分类号： B28D5/00 ,  H01L21/00 ,  H01L21/68 ,  B26D3/08 ,  B26F3/00 ,  B31B1/25

    CPC分类号： H01L21/67092 ,  B28D5/0011 ,  B28D5/0088 ,  H01L21/68 ,  Y10T82/16967 ,  Y10T83/0333 ,  Y10T225/30 ,  Y10T225/325 ,  Y10T225/371

    摘要： A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.

    摘要翻译： 一种脆性材料旋转和对准机构，包括轴承，旋转台和驱动机构U，并安装在脆性材料划线和断裂装置的工作台中; 携带脆性材料，例如，用于划线和分解成单个模具的半导体晶片。 该驱动机构使用柔性传递部件来旋转旋转台以降低安装成本，不需要在安装期间进行精密调节，并且防止由于传动部件和驱动之间的摩擦而产生背睫毛或产生颗粒 驱动机构的轮子，或者在传动构件和旋转台之间。

    Brittle material breaking apparatus
    6.
    发明申请
    Brittle material breaking apparatus 有权
    脆性材料破碎装置

    公开(公告)号：US20050121486A1

    公开(公告)日：2005-06-09

    申请号：US10782913

    申请日：2004-02-23

    申请人： Kuei-Jung Chen ,  Meng-Chun Chen ,  Chih-Ming Chen ,  Chih-Yi Lai

    发明人： Kuei-Jung Chen ,  Meng-Chun Chen ,  Chih-Ming Chen ,  Chih-Yi Lai

    IPC分类号： B26F3/00 ,  B26F3/02 ,  H01L21/00

    CPC分类号： H01L21/67092 ,  B26F3/002 ,  Y10T225/325 ,  Y10T225/371 ,  Y10T225/379 ,  Y10T225/386

    摘要： A brittle material breaking apparatus using a lifting mechanism to lift/lower a carrier wherein the lifting mechanism is controlled to lift the carrier for holding the brittle material for breaking, and then to lower the carrier from the brittle material to a distance for enabling the brittle material to be shifted to a next scribe line for further breaking, preventing the occurrence of friction between the brittle material and the carrier and the production of static electricity and micro particles and, improving the breaking quality. The brittle material breaking apparatus further includes a stroke fine adjustment mechanism adapted to adjust the stroke of the breaking-cutter relative to the brittle material.

    摘要翻译： 一种使用提升机构来提升/降低载体的脆性材料断开装置，其中提升机构被控制以提升载体以保持用于断裂的脆性材料，然后将载体从脆性材料降低到一定距离，以使脆性 要转移到下一划线以进一步断裂的材料，防止脆性材料和载体之间的摩擦发生，并产生静电和微粒，并提高断裂质量。 脆性材料破碎装置还包括行程微调机构，该机构适于相对于脆性材料调节断刀的行程。

    Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus
    7.
    发明授权
    Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus 失效
    用于脆性材料划线和/或断裂装置的脆性材料旋转和对准机构

    公开(公告)号：US07063246B2

    公开(公告)日：2006-06-20

    申请号：US11066429

    申请日：2005-02-28

    申请人： Kuei-Jung Chen ,  Chin-Chong Chiang

    发明人： Kuei-Jung Chen ,  Chin-Chong Chiang

    IPC分类号： B26D3/08

    CPC分类号： H01L21/67092 ,  B28D5/0011 ,  B28D5/0088 ,  H01L21/68 ,  Y10T82/16967 ,  Y10T83/0333 ,  Y10T225/30 ,  Y10T225/325 ,  Y10T225/371

    摘要： A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.

    摘要翻译： 一种脆性材料旋转和对准机构，包括轴承，旋转台和驱动机构U，并安装在脆性材料划线和断裂装置的工作台中; 携带脆性材料，例如用于划线和分解成单个模具的半导体晶片。 该驱动机构使用柔性传递部件来旋转旋转台以降低安装成本，不需要在安装期间进行精密调节，并且防止由于传动部件和驱动之间的摩擦而产生背睫毛或产生颗粒 驱动机构的轮子，或者在传动构件和旋转台之间。

    Cutting tool angle adjustment method
    10.
    发明申请
    Cutting tool angle adjustment method 有权
    切削刀具角度调整方法

    公开(公告)号：US20060036337A1

    公开(公告)日：2006-02-16

    申请号：US11010336

    申请日：2004-12-14

    申请人： Kuei-Jung Chen ,  Sin-Len Tan ,  Chih-Yi Lai ,  Meng-Chun Chen

    发明人： Kuei-Jung Chen ,  Sin-Len Tan ,  Chih-Yi Lai ,  Meng-Chun Chen

    IPC分类号： G05B19/18 ,  G05B11/32 ,  G06F19/00

    CPC分类号： G05B19/4015 ,  G05B2219/37208 ,  G05B2219/45031 ,  G05B2219/45212 ,  G05B2219/50057 ,  G05B2219/50074 ,  Y10T83/148

    摘要： A cutting tool adjustment method is disclosed to lower a cutting tool on a transparent Mylar to produce an indentation before actual scribing operation, and then to pick up the image of the indentation, and then to use a numerical analysis method and the set formula to automatically calculate the correction angle and position and to adjust the angle and position of the cutting tool subject to the calculation result, and then to repeat the calculation and adjustment procedure if necessary. Thus, the cutting tool and its cutting edge can be accurately adjusted to the correct angle and position to obtain a precise indentation. Further, by means of the automatic adjustment procedure, the present invention saves much adjusting time, thereby improving the productivity.

    摘要翻译： 公开了一种切割工具调整方法，以降低透明聚酯薄膜上的切割工具，以在实际划线操作之前产生凹痕，然后拾取凹痕的图像，然后使用数字分析方法和设定公式自动 计算校正角度和位置，并根据计算结果调整切削刀具的角度和位置，然后根据需要重复计算和调整步骤。 因此，可以将切削刀具及其切削刃精确地调节到正确的角度和位置，以获得精确的压痕。 此外，通过自动调整程序，本发明节省了大量的调整时间，从而提高了生产率。