发明授权
US06898561B1 Methods, apparatus and computer program products for modeling integrated circuit devices having reduced linewidths
失效
用于对具有减小的线宽的集成电路器件进行建模的方法,装置和计算机程序产品
- 专利标题: Methods, apparatus and computer program products for modeling integrated circuit devices having reduced linewidths
- 专利标题(中): 用于对具有减小的线宽的集成电路器件进行建模的方法,装置和计算机程序产品
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申请号: US09465433申请日: 1999-12-21
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公开(公告)号: US06898561B1公开(公告)日: 2005-05-24
- 发明人: Chunbo Liu , Zhijian Ma , Jeong Yeol Choi
- 申请人: Chunbo Liu , Zhijian Ma , Jeong Yeol Choi
- 申请人地址: US CA Santa Clara
- 专利权人: Integrated Device Technology, Inc.
- 当前专利权人: Integrated Device Technology, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Myers Bigel Sibley & Sajovec
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Methods, apparatus and computer program products for modeling integrated circuits having dense devices therein that experience linewidth (e.g., gate electrodes) reductions during fabrication are provided. For dense devices having electrical paths therein and first and second gate electrodes that overlie the electrical path, operations include determining an electrical gate length of the first gate electrode by evaluating a change in current through the electrical path relative to a change in gate length of the second gate electrode. The operation to determine the electrical gate length of the first gate electrode includes evaluating a change in simulated drain-to-source current through the electrical path relative to a change in the electrical gate length of the second gate electrode.
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