发明授权
US06898561B1 Methods, apparatus and computer program products for modeling integrated circuit devices having reduced linewidths 失效
用于对具有减小的线宽的集成电路器件进行建模的方法,装置和计算机程序产品

Methods, apparatus and computer program products for modeling integrated circuit devices having reduced linewidths
摘要:
Methods, apparatus and computer program products for modeling integrated circuits having dense devices therein that experience linewidth (e.g., gate electrodes) reductions during fabrication are provided. For dense devices having electrical paths therein and first and second gate electrodes that overlie the electrical path, operations include determining an electrical gate length of the first gate electrode by evaluating a change in current through the electrical path relative to a change in gate length of the second gate electrode. The operation to determine the electrical gate length of the first gate electrode includes evaluating a change in simulated drain-to-source current through the electrical path relative to a change in the electrical gate length of the second gate electrode.
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