发明授权
- 专利标题: Strained channel on insulator device
- 专利标题(中): 应变绝缘体上的通道
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申请号: US10407761申请日: 2003-04-03
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公开(公告)号: US06900502B2公开(公告)日: 2005-05-31
- 发明人: Chung-Hu Ge , Chao-Hsuing Wang , Chien-Chao Huang , Wen-Chin Lee , Chenming Hu
- 申请人: Chung-Hu Ge , Chao-Hsuing Wang , Chien-Chao Huang , Wen-Chin Lee , Chenming Hu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/30 ; H01L21/762 ; H01L21/84 ; H01L27/01 ; H01L27/12 ; H01L29/02 ; H01L29/72 ; H01L29/772
摘要:
A semiconductor device 10 includes a substrate 12 (e.g., a silicon substrate) with an insulating layer 14 (e.g., an oxide such as silicon dioxide) disposed thereon. A first semiconducting material layer 16 (e.g., SiGe) is disposed on the insulating layer 14 and a second semiconducting material layer 18 (e.g., Si) is disposed on the first semiconducting material layer 16. The first and second semiconducting material layers 16 and 18 preferably have different lattice constants such that the first semiconducting material layer 16 is compressive and the second semiconducting material layer is tensile 18.
公开/授权文献
- US20040195623A1 Strained channel on insulator device 公开/授权日:2004-10-07
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