发明授权
- 专利标题: Piezoelectric element, actuator, and inkjet head
- 专利标题(中): 压电元件,执行器和喷墨头
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申请号: US10128115申请日: 2002-04-23
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公开(公告)号: US06903491B2公开(公告)日: 2005-06-07
- 发明人: Yousuke Irie , Kazuo Yokoyama
- 申请人: Yousuke Irie , Kazuo Yokoyama
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Harness, Dickey & Pierce, P.LC.
- 优先权: JP2001-128875 20010426
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; H01L41/09 ; H01L41/08
摘要:
A piezoelectric element includes: a piezoelectric film made of PZT; a pair of electrodes (a lower electrode and an upper electrode) arranged with the piezoelectric film being interposed therebetween; and a base film made of PLT having a thickness of about 50 nm to 200 nm and provided between the piezoelectric film and the lower electrode. The piezoelectric element, as a whole, is provided on a substrate, which may be a stainless steel substrate (polycrystalline), a heat-resistant glass substrate (amorphous), a silicon substrate (single crystal), etc. A piezoelectric element having a good piezoelectric characteristic can be provided on a substrate other than a single crystal substrate.
公开/授权文献
- US20020180843A1 Piezoelectric element, actuator, and inkjet head 公开/授权日:2002-12-05