发明授权
- 专利标题: Capacitance type dynamical quantity sensor
- 专利标题(中): 电容式动力传感器
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申请号: US10703460申请日: 2003-11-10
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公开(公告)号: US06909158B2公开(公告)日: 2005-06-21
- 发明人: Tetsuo Yoshioka , Yukihiro Takeuchi , Kazuhiko Kano
- 申请人: Tetsuo Yoshioka , Yukihiro Takeuchi , Kazuhiko Kano
- 申请人地址: JP Kariya
- 专利权人: Denso Corporation
- 当前专利权人: Denso Corporation
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2002-334070 20021118
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; H01L29/84 ; H01L27/00
摘要:
A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.
公开/授权文献
- US20040094814A1 Capacitance type dynamical quantity sensor 公开/授权日:2004-05-20
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