摘要:
A capacitance type physical quantity sensor detects physical quantity. The sensor includes a movable portion including a movable electrode and a fixed portion including a fixed electrode. The fixed electrode includes a detection surface facing a detection surface of the movable electrode. The movable electrode is movable toward the fixed electrode in accordance with the physical quantity so that a distance between the detection surfaces is changeable. At least one of the movable and the fixed electrodes includes a groove. The groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface.
摘要:
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
摘要:
A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.
摘要:
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
摘要:
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
摘要:
The present invention provides a polyimide resin laminate of one layer of a polyimide resin film and one or more layers of activated fluorine resin films, wherein undulations of 0.03-5 .mu.m are formed on the outer surface of the fluorine resin films. According to the present invention, the slidability of the laminate is improved, trouble in the course of taping due to poor slidability is prevented, the taping workability is markedly improved and an improved quality of polyimide laminates is provided.
摘要:
An end portion-treating method and apparatus for manufacturing a synthetic resin film by first extruding through a slit die or coating with the use of a coater onto or on a conveyor belt or drum a fluid synthetic resin composition in a smooth layer form, and then solidifying it. Gas is blown at both end portions of the film of the fluid synthetic resin composition extruded onto the surface of the conveyor belt or drum to change the sectional form of both end portions. A synthetic resin film is obtained without creasing in the process of drying or cooling of the film or lifting of the film off the surface of the conveyor belt. A film of superior quality is thus provided. Also, since both longitudinal end portions of the film need not be trimmed off and discarded, the film manufacturing effifiency is improved, and the manufacturing cost is reduced substantially.
摘要:
A detector device of the present invention detects densities of components, such as gasoline and ethanol, contained in mixture fuel even when some water is included in the mixture fuel. The detector device includes a sensor having a pair or electrodes, an electronic device for calculating the densities and a memory device for storing permittivities of pure components including water measured beforehand. Alternating current having two different frequencies f1, f2 is applied to the pair of electrodes immersed in the mixture fuel to detect the permittivities of the mixture fuel under f1 and f2. The two frequencies, f1 and f2, are so chosen that the premittivities of gasoline and ethanol show no change between f1 and f2, while the permittivitiy of water shows a substantial difference between f1 and f2. The electronic device calculates the densities of the components based on permittivities of the mixture fuel detected by the sensor and those of components stored in the memory device.
摘要:
An ultrasonic sensor includes an ultrasonic detector for detecting an ultrasonic wave, an acoustic matching member joined to the ultrasonic detector, a housing in which the ultrasonic detector and the acoustic matching member are accommodated, a vibration isolator located between the acoustic matching member and an inner side wall of the housing to damp an unwanted vibration from outside, and a cushion member located between the ultrasonic detector and an inner bottom wall of the housing to absorb external force applied to the ultrasonic sensor The cushion member is not in contact with the acoustic matching member.
摘要:
A fluid sensor detects property of fluid by dipping the sensor in the fluid. The sensor includes: a semiconductor substrate; and a comb-teeth electrode made of a first diffusion layer and disposed on a first surface of the substrate. Although the comb-teeth electrode is capable of directly contacting the fluid without a protection film, corrosion resistance of the sensor against the fluid is improved. Further, since the sensor has no protection film, the sensor can detect the property accurately.