Capacitance type physical quantity sensor
    1.
    发明授权
    Capacitance type physical quantity sensor 有权
    电容式物理量传感器

    公开(公告)号:US07201053B2

    公开(公告)日:2007-04-10

    申请号:US10834183

    申请日:2004-04-29

    IPC分类号: G01P15/125 G01P9/04

    摘要: A capacitance type physical quantity sensor detects physical quantity. The sensor includes a movable portion including a movable electrode and a fixed portion including a fixed electrode. The fixed electrode includes a detection surface facing a detection surface of the movable electrode. The movable electrode is movable toward the fixed electrode in accordance with the physical quantity so that a distance between the detection surfaces is changeable. At least one of the movable and the fixed electrodes includes a groove. The groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface.

    摘要翻译: 电容式物理量传感器检测物理量。 传感器包括可移动部分,其包括可动电极和包括固定电极的固定部分。 固定电极包括面向可动电极的检测面的检测面。 可移动电极可以根据物理量朝向固定电极移动,使得检测表面之间的距离是可变的。 可移动和固定电极中的至少一个包括凹槽。 凹槽设置在可移动和固定电极中的一个的顶部或底部上,具有从顶部或底部的预定深度,并且从检测表面延伸到相对的表面。

    Capacitance type acceleration sensor

    公开(公告)号:US20060053890A1

    公开(公告)日:2006-03-16

    申请号:US11265281

    申请日:2005-11-03

    IPC分类号: G01P15/125

    摘要: A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

    Capacitance type dynamical quantity sensor
    3.
    发明授权
    Capacitance type dynamical quantity sensor 失效
    电容式动力传感器

    公开(公告)号:US06909158B2

    公开(公告)日:2005-06-21

    申请号:US10703460

    申请日:2003-11-10

    CPC分类号: G01P15/125 G01P2015/0814

    摘要: A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.

    摘要翻译: 电容型动力传感器包括半导体衬底,根据动力位移的重量部分,与重量部分一体化的可动电极和面对可动电极的固定电极。 可动电极和固定电极提供具有电容的电容器。 可移动电极可根据动态量移动。 电容器的电容根据可动电极的位移而变化,从而以外部电路测量作为电容变化的动力学量。 面对固定电极的可动电极的面对面具有大致矩形形状,并且面对面的纵横比在0.1和10之间的范围内。

    Capacitance type acceleration sensor
    4.
    发明授权
    Capacitance type acceleration sensor 有权
    电容式加速度传感器

    公开(公告)号:US07107846B2

    公开(公告)日:2006-09-19

    申请号:US11265281

    申请日:2005-11-03

    IPC分类号: G01P15/125

    摘要: A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

    摘要翻译: 电容型加速度传感器包括半导体基板,通过弹簧部分支撑在基板上的重量部分,与重物部分一体化的可动电极以及与该基板悬臂连接的固定电极。 根据加速度,可移动电极与可动电极的相对表面一起移动。 可动电极的相对表面面对固定电极的相对表面,以提供电容器。 电容器的电容根据可动电极的位移而变化,使得外部电路作为电容变化来检测加速度。 可移动和固定电极的每个相对表面具有用于增加电容变化的凹凸部分。

    Capacitance type acceleration sensor

    公开(公告)号:US07004026B2

    公开(公告)日:2006-02-28

    申请号:US10703461

    申请日:2003-11-10

    IPC分类号: G01P15/125

    摘要: A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

    Detector device for detecting component density contained in mixture fuel
    8.
    发明申请
    Detector device for detecting component density contained in mixture fuel 审中-公开
    用于检测混合燃料中所含的组分密度的检测装置

    公开(公告)号:US20090157345A1

    公开(公告)日:2009-06-18

    申请号:US12314462

    申请日:2008-12-11

    IPC分类号: G06F15/00 G01K17/00 G01N9/36

    CPC分类号: G01N27/221

    摘要: A detector device of the present invention detects densities of components, such as gasoline and ethanol, contained in mixture fuel even when some water is included in the mixture fuel. The detector device includes a sensor having a pair or electrodes, an electronic device for calculating the densities and a memory device for storing permittivities of pure components including water measured beforehand. Alternating current having two different frequencies f1, f2 is applied to the pair of electrodes immersed in the mixture fuel to detect the permittivities of the mixture fuel under f1 and f2. The two frequencies, f1 and f2, are so chosen that the premittivities of gasoline and ethanol show no change between f1 and f2, while the permittivitiy of water shows a substantial difference between f1 and f2. The electronic device calculates the densities of the components based on permittivities of the mixture fuel detected by the sensor and those of components stored in the memory device.

    摘要翻译: 本发明的检测装置即使在混合燃料中含有一些水时也能够检测混合燃料中所含的汽油,乙醇等成分的浓度。 检测器装置包括具有一对或多个电极的传感器,用于计算密度的电子设备和用于存储包括预先测量的水的纯净组分的介电常数的存储器件。 将具有两个不同频率f1,f2的交流电施加到浸在混合燃料中的一对电极,以检测f1和f2下的混合燃料的介电常数。 两个频率f1和f2如此选择,使得汽油和乙醇的离子浓度在f1和f2之间不显示变化,而水的容许度在f1和f2之间显示出显着的差异。 电子设备基于由传感器检测到的混合物燃料的容量和存储在存储器件中的部件的密度来计算部件的密度。

    ULTRASONIC SENSOR
    9.
    发明申请
    ULTRASONIC SENSOR 失效
    超声波传感器

    公开(公告)号:US20080307888A1

    公开(公告)日:2008-12-18

    申请号:US12137048

    申请日:2008-06-11

    IPC分类号: G01N29/00

    摘要: An ultrasonic sensor includes an ultrasonic detector for detecting an ultrasonic wave, an acoustic matching member joined to the ultrasonic detector, a housing in which the ultrasonic detector and the acoustic matching member are accommodated, a vibration isolator located between the acoustic matching member and an inner side wall of the housing to damp an unwanted vibration from outside, and a cushion member located between the ultrasonic detector and an inner bottom wall of the housing to absorb external force applied to the ultrasonic sensor The cushion member is not in contact with the acoustic matching member.

    摘要翻译: 一种超声波传感器,包括:超声波检测用超声波检测器,与超声波检测器接合的声匹配部件,容纳超声波检测器和声匹配部件的壳体;位于声匹配部件与内窥镜 外壳的侧壁,以阻止来自外部的不需要的振动,以及位于超声波检测器和壳体的内底壁之间的缓冲构件,以吸收施加到超声波传感器的外力。缓冲构件不与声匹配 会员。

    Fluid sensor and impedance sensor
    10.
    发明申请
    Fluid sensor and impedance sensor 审中-公开
    流体传感器和阻抗传感器

    公开(公告)号:US20080238449A1

    公开(公告)日:2008-10-02

    申请号:US12073816

    申请日:2008-03-11

    IPC分类号: G01R27/08 G01N27/22

    CPC分类号: G01N27/226 G01N33/2852

    摘要: A fluid sensor detects property of fluid by dipping the sensor in the fluid. The sensor includes: a semiconductor substrate; and a comb-teeth electrode made of a first diffusion layer and disposed on a first surface of the substrate. Although the comb-teeth electrode is capable of directly contacting the fluid without a protection film, corrosion resistance of the sensor against the fluid is improved. Further, since the sensor has no protection film, the sensor can detect the property accurately.

    摘要翻译: 流体传感器通过将传感器浸入流体来检测流体的性质。 传感器包括:半导体衬底; 以及由第一扩散层制成并设置在基板的第一表面上的梳齿电极。 尽管梳齿电极能够直接接触没有保护膜的流体,但传感器抵抗流体的耐腐蚀性得到改善。 此外,由于传感器没有保护膜,所以传感器可以准确地检测出该属性。