发明授权
US06919666B2 Adjusting device for displacing individual elements of optical systems or of measuring systems 失效
用于移动光学系统或测量系统的各个元件的调整装置

Adjusting device for displacing individual elements of optical systems or of measuring systems
摘要:
In an adjusting device for displacing individual elements (2) of optical systems or of measuring systems in which the element to be displaced is movable on a base (1) along a predetermined direction (x) by means of a piezoelectric actuator arrangement (21, 22) which is supported by the element (2) and which is constructed and controllable in such a way that it exerts shock pulses on the element (2) in order to carry out a stepwise movement of the element (2) on the base (1), the element (2) is arranged in a body (1; 27) which has an open or closed hollow cross section and is supported in a frictional engagement on this body, at least at one location, with the intermediary of a pretensioned spring device (8, 8′).
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