发明授权
US06919666B2 Adjusting device for displacing individual elements of optical systems or of measuring systems
失效
用于移动光学系统或测量系统的各个元件的调整装置
- 专利标题: Adjusting device for displacing individual elements of optical systems or of measuring systems
- 专利标题(中): 用于移动光学系统或测量系统的各个元件的调整装置
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申请号: US09980722申请日: 2001-03-15
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公开(公告)号: US06919666B2公开(公告)日: 2005-07-19
- 发明人: Karlheinz Bartzke , Stefan Mack , Matthias Burkhardt , Thomas Hartmann , Reinhard Steiner , Peter Dittrich , Karl-Heinz Klopfleisch
- 申请人: Karlheinz Bartzke , Stefan Mack , Matthias Burkhardt , Thomas Hartmann , Reinhard Steiner , Peter Dittrich , Karl-Heinz Klopfleisch
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Jena GmbH
- 当前专利权人: Carl Zeiss Jena GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Reed Smith LLP
- 优先权: DE10012751 20000316
- 国际申请: PCT/EP01/02921 WO 20010315
- 国际公布: WO01/69297 WO 20010920
- 主分类号: G02B7/08
- IPC分类号: G02B7/08 ; H01L41/09 ; H02N2/00 ; H02N2/04 ; H01L41/08
摘要:
In an adjusting device for displacing individual elements (2) of optical systems or of measuring systems in which the element to be displaced is movable on a base (1) along a predetermined direction (x) by means of a piezoelectric actuator arrangement (21, 22) which is supported by the element (2) and which is constructed and controllable in such a way that it exerts shock pulses on the element (2) in order to carry out a stepwise movement of the element (2) on the base (1), the element (2) is arranged in a body (1; 27) which has an open or closed hollow cross section and is supported in a frictional engagement on this body, at least at one location, with the intermediary of a pretensioned spring device (8, 8′).
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